Features of dislocation images reconstructed from step‐scanned white X‐ray section topographs

Kajiwara, Kentaro; Kawado, Seiji; Iida, Satoshi; Suzuki, Yoshiyuki; Chikaura, Yoshinori

doi:10.1002/pssa.200675677

“…Examples are oxygen precipitates in silicon [54] as well as 3D reconstructions of dislocation networks in CaF 2 [55] and silicon. [56] The 3D reconstruction of the dislocations and small angle grain boundaries in quartz, diamond, and iron achieved from stacks of section scans are also reported by Kvardakov and compared to the topo-tomography, which is another approach for 3D topography. [57] Ludwig et al proposed the combination of monochromatic topography with routines from tomography to the so called "topo-tomography."…”

Section: Introductionmentioning

confidence: 92%

X‐Ray Topography—More than Nice Pictures

Danilewsky

¹

2020

Crystal Research and Technology

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X‐ray topography—a well‐known diffraction imaging method—is widely used for the characterization of extended crystal defects like dislocations. Herein, the progress toward the quantification besides the number and nature of dislocations is given. The diffracted images include additional information about tilt and strain, which can be measured in real‐time, thanks to the improved digital detection systems. This allows not only the fast mapping of huge samples like 450 mm diameter Si wafers, the in situ observation of the dislocation, or crack dynamics at high temperatures, but also the stress analysis in electronic devices in operando. In addition to typical white X‐ray beam methods like stacks of section topographs, the monochromatic diffraction laminography allows a 3D representation of the dislocation arrays. The merits and limitations of X‐ray topography are demonstrated by semiconductor materials as an example.

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“…Нельзя не упомянуть о том, что большое количество работ с использованием СИ было выполнено пошаговой регистрацией стоп-кадров в сочетании с линейным и/или угловым перемещением образца. Обработав топограммы при помощи программы визуализации, экспериментаторы получали трехмерные картины распределения дефектов в объеме кристаллов [86][87][88][89][90]. Однако это не количественный подход.…”

Section: примеры применения синхротронного излучения в секционных мет...unclassified

Cекционные Методы Рентгеновской Дифракционной Топографии (Обзор)

Шульпина¹,

Суворов²,

Смирнова³

et al. 2022

Журнал Технической Физики

2

0

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X-ray topography is a group of methods for obtaining diffraction images of structural defects in crystals. Among them, section topography techniques are distinguished by their abilities in acquiring quantitative information about defects based on the analysis of the images. For this purpose, special applications of the dynamic theory of X-ray diffraction are being developed. The interference of wave fields excited in a crystal by an X-ray beam is the basis of the section methods. Their sensitivity to weak lattice distortions is much higher than that of other X-ray methods. This review describes the physical foundations and implementation of the section topography techniques, as well as the results of computer simulating the wave field in a crystal. We present some examples of solving materials science and microelectronics problems and briefly describe the section topography using synchrotron radiation.

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“…It should be mentioned that a large number of studies using SR were performed by step-scanning technique stopframes in combination with linear and/or angular movement of the sample. Having processed the topograms using a visualization program, the experimenters obtained 3D patterns of the defects distribution in the bulk of the crystals [86][87][88][89][90]. However, this is not a quantitative approach.…”

Section: Examples Of Use Of Synchrotron Radiation In Section Topograp...mentioning

confidence: 99%

Section methods of X-Ray diffraction topography

Shul’pina

¹

,

Суворов

²

,

Смирнова

³

et al. 2022

Technical Physics

3

0

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X-ray topography is a group of methods for obtaining diffraction images of structural defects in crystals. Among them, section topography techniques are distinguished by their abilities in acquiring quantitative information about defects based on the analysis of the images. For this purpose, special applications of the dynamic theory of X-ray diffraction are being developed. The interference of wave fields excited in a crystal by an X-ray beam is the basis of the section methods. Their sensitivity to weak lattice distortions is much higher than that of other X-ray methods. This review describes the physical foundations and implementation of the section topography techniques, as well as the results of computer simulating the wave field in a crystal. We present some examples of solving materials science and microelectronics problems and briefly describe the section topography using synchrotron radiation. Keywords: X-ray topography, single crystals, defects in crystals, silicon, diamond, indium antimonide.

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Features of dislocation images reconstructed from step‐scanned white X‐ray section topographs

Cited by 13 publications

References 7 publications

X‐Ray Topography—More than Nice Pictures

X‐Ray Topography—More than Nice Pictures

Cекционные Методы Рентгеновской Дифракционной Топографии (Обзор)

Section methods of X-Ray diffraction topography

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