“…The restrictions for the SIMS applications, particularly, in case of simultaneous high layer resolution and high concentration sensitivity or locality, are also established. Processes of emission during bombardment of the surface with ions of inert gases or electronegative active gases are studied the most thoroughly [1][2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19].…”