FEA based design optimization of exciting sensitivity for micromachined piezoelectric transducer

Cai, Chenguang; Liu, Yang; Han, Yanan; Chen, Quayle; Salo, Antti; Xu, Leon

doi:10.1109/esime.2009.4938421

EuroSimE 2009 - 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelect 2009

DOI: 10.1109/esime.2009.4938421

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FEA based design optimization of exciting sensitivity for micromachined piezoelectric transducer

Chenguang Cai

Yang Liu

Yanan Han

et al.

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FEA based design optimization of exciting sensitivity for micromachined piezoelectric transducer

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