2014
DOI: 10.1007/s10853-014-8349-2
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Fe dopants enhancing ethanol sensitivity of ZnO thin film deposited by RF magnetron sputtering

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Cited by 22 publications
(7 citation statements)
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“…Fe doped ZnO films have been prepared by variety of preparation methods such as DC thermal plasma [7], RF magnetron sputtering [8,9], spray pyrolysis [10], chemical co-precipitation [11] and sol-gel [12,13]. Compared with other methods, the sol-gel offers the greatest possibility for depositing a film with large area at low cost for applications.…”
Section: Introductionmentioning
confidence: 99%
“…Fe doped ZnO films have been prepared by variety of preparation methods such as DC thermal plasma [7], RF magnetron sputtering [8,9], spray pyrolysis [10], chemical co-precipitation [11] and sol-gel [12,13]. Compared with other methods, the sol-gel offers the greatest possibility for depositing a film with large area at low cost for applications.…”
Section: Introductionmentioning
confidence: 99%
“…This process reduces the potential barrier height and the film resistance. The release of electrons during the interaction of the oxygen ions with ethanol molecules can be explained as follows [13]:…”
Section: Gas Sensing Mechanismmentioning
confidence: 99%
“…As the surface morphology depends on the routes of synthesis, types, and the concentrations of metal-doped into ZnO [10][11][12], the diverse synthesis methods such as radio frequency sputtering, spray pyrolysis, thermal oxidation, pulse laser deposition, dip coating, hydrothermal, and spin coating are being employed to synthesize the various metals (Fe, Al, Cu, Sn, etc.) doped ZnO films [12][13][14][15][16][17]. Nonetheless, most of the mentioned synthesis methods necessitate a complex experimental apparatus for achieving the desired quality of ZnO film.…”
Section: Introductionmentioning
confidence: 99%
“…Therefore, it can be easily incorporated into Zn lattice sites either substitutionally or interstitially without distorting the crystal structure of ZnO with greater contribution of charge carriers for the improvement of properties of ZnO. 21 Various physical and chemical methods have been applied for the fabrication of Fe incorporated ZnO thin films including radio frequency (RF) sputtering, direct current (DC) sputtering, 22,23 sol-gel, 24 chemical vapor deposition, 25 spray pyrolysis, 26 hydrothermal process, 27 electrodeposition 28 and dip coating technique. 29 Chemical vapour deposition (CVD) method has gained much importance in past few years for the fabrication of thin films of oxide materials and metal-chalcogenide.…”
Section: Introductionmentioning
confidence: 99%