FBAR Filter Structural Parameters Optimizing With Deep-Learning Approach

Realizing thin-film acoustic wave resonators presents many design and fabrication challenges. Actual material specifications always differ from nominal material properties employed in simulations, as they depend on the deposition technique and parameters used and on equipment type and status. Moreover, each deposition process introduces a degree of uncertainty regarding the thicknesses of the layers. All these factors have a substantial impact on the resonance frequency, which often differs from the designed value. This work details the design and fabrication of an aluminum nitride (AlN)-based thin-Film Bulk Acoustic wave Resonator (FBAR) showing one of the highest products of Q-factor and electromechanical coupling of 6895. The design process is based on an innovative, fast, and scalable design and fabrication approach that considers fabrication tolerances. The algorithm returns very fast results on the order of seconds, and successfully estimates the resonance of a designed stack at 2.55 GHz with a very low error of 0.005 GHz (about 0.2%). The FBAR layer stack is suspended on a polymeric membrane and an innovative rapid dissolving sacrificial layer made of Lift-Off Resist (LOR). This new fabrication protocol obtains resonators with an electromechanical coupling factor of 4.7% and a maximum quality factor of 1467, respectively.

show abstract

Fabrication of a New Air-Gap FBAR on an Organic Sacrificial Layer through an Innovative Design Algorithm

Niro

Marasco

Rizzi

et al. 2023

Applied Sciences

View full text Add to dashboard Cite

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

hi@scite.ai

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

FBAR Filter Structural Parameters Optimizing With Deep-Learning Approach

Cited by 1 publication

References 6 publications

Fabrication of a New Air-Gap FBAR on an Organic Sacrificial Layer through an Innovative Design Algorithm

Fabrication of a New Air-Gap FBAR on an Organic Sacrificial Layer through an Innovative Design Algorithm

Contact Info

Product

Resources

About