Fatigue Test of Al-3%Ti Using Axial Loading Testing Machine for MEMS Materials

Abstract

This paper presents high cycle fatigue properties of an Al-3%Ti thin film, used in a RF (radio-frequency) MEMS switch for a mobile phone. The thickness and width of the thin film of specimen are 1.1 μm and 480 μm, respectively. Tensile tests of five specimens are performed, from which the ultimate strength is found to be 144MPa. High cycle fatigue tests of six specimens are also performed, from which the fatigue strength coefficient and the fatigue strength exponent are found to be 336MPa and −0.1514, respectively.

A Phenomenological Discrete Brittle Damage-Mechanics Model for Fatigue of MEMS Devices With Application to LIGA Ni

“…6 shows the dimensions of the simulated specimen. Specimens of similar shape and dimension have been produced using micromachining techniques by several research groups [28]- [31] for fatigue testing by external actuation. Table I contains the parameters used in this investigation.…”