Fast Zernike fitting of freeform surfaces using the Gauss-Legendre quadrature

Abstract

Zernike polynomial orthogonality, an established mathematical principle, is leveraged with the Gauss-Legendre quadrature rule in a rapid novel approach to fitting data over a circular domain. This approach provides significantly faster fitting speeds, in the order of thousands of times, while maintaining comparable error rates achieved with conventional least-square fitting techniques. We demonstrate the technique for fitting mid-spatial-frequencies (MSF) prevalent in small-tool-manufacturing typical of aspheric and freeform optics that are poised to soon permeate a wide range of optical technologies.