Fast simulation method for parameter reconstruction in optical metrology

Abstract

), and is made available as an electronic preprint with permission of SPIE. One print or electronic copy may be made for personal use only. Systematic or multiple reproduction, distribution to multiple locations via electronic or other means, duplication of any material in this paper for a fee or for commercial purposes, or modification of the content of the paper are prohibited. ABSTRACTA method for automatic computation of parameter derivatives of numerically computed light scattering signals is demonstrated. The finite-element based method is validated in a numerical convergence study, and it is applied to investigate the sensitivity of a scatterometric setup with respect to geometrical parameters of the scattering target. The method can significantly improve numerical performance of design optimization, parameter reconstruction, sensitivity analysis, and other applications.Keywords: Scatterometry, optical metrology, 3D rigorous electromagnetic field simulations, computational metrology, computational lithography, finite-element methods

Nanophotonic light management for perovskite–silicon tandem solar cells

“…The partial derivatives of the absorption of the perovskite and c-Si absorber layers with respect to the perovskite layer thickness are computed directly in JCMsuite. 58 As starting value for the architecture with the smallest aspect ratio we choose a perovskite thickness of 333 nm, which is the optimal value for the planar architecture. 42 For each new value of aspect ratio we use as starting value the optimized value for the previous aspect ratio.…”

Global optimization of complex optical structures using Bayesian optimization based on Gaussian processes

“…This is promising since, on the one hand, it is possible within the finite-element framework for solving Maxwell's equations to compute partial derivatives rigorously without significant additional computational costs. 9 On the other hand, Gaussian processes can be extended to include also derivative information. 10 This additional information might allow for search strategies that reach optimal results with significantly fewer evaluations of the objective function.…”

“…(3) and (4) in conjunction with the three different acquisition functions α PoI , α EI , and α LCB defined in Eqs. (8), (9), and (10).…”

“…The three acquisition functions defined in Eqs. (8),(9), and (10) for the Gaussian processes shown inFig. 2.…”

Fourier ellipsometry – an ellipsometric approach to Fourier scatterometry

“…The same sensitivity calculations have also been performed for a 3D structure, as shown in Figure 4. In this case we used finite element method (FEM) calculations by the JCMsuite software [18], which provides advantages compared to RCWA for 3D structures [19]. We investigated a hexagonal lattice of holes in Si with varied height and parameters described in the caption of Figure 4.…”