“…Flexible optoelectronic devices provide many novel functionalities and have the potential to open up a new branch of industry. − As another novel application, transparent devices have attracted considerable interest as next-generation display technology in various fields, including wearable intelligent electronics, automobile windshield navigation, and IoT (Internet of Things) applications. − Because of the extraordinary characteristics of low power consumption, being nontoxic, long lifetime, and high efficiency, GaN-based optoelectronic devices, e.g., light-emitting devices (LEDs), are promising for the above fields. , In addition, this material is also attractive for piezoelectric devices, such as piezoelectric sensors and piezoelectric transistors. − Thus, achieving flexible and transparent GaN-based films is a decisive step for future markets and applications. Over the past few years, the fabrication of flexible devices based on thin-film and micropyramid GaN-based materials has been intensively studied by developing procedures to transfer the epitaxial structures from the original rigid substrates used for growth to soft substrates. , These additional procedures usually require laser lift-off or selective wet etching of a thick sacrificial layer or the entire source substrate. ,− However, besides expensive laser equipment, the laser lift-off technology requires the bandgap of substrate should be larger than that of GaN, which limits its applications. , Furthermore, the sacrificial layers are normally thick, e.g., 2.5 μm in ref , or may need to be highly doped, which can increase the epitaxial cost and deteriorate the epitaxial quality.…”