Fast measurement method of defocused differential correlation-confocal microscopy

Li, Rongji; Ma, Han; Li, Angze; Zhao, Wenguang; Qiu, Lirong

doi:10.1016/j.measurement.2022.112271

Cited by 2 publications

(1 citation statement)

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“…To address these problems, a normal tracking differential confocal measurement method for multiple geometric parameters of the HSR with a common reference is proposed. The previously proposed differential confocal technique can be applied to measure the step sample surface and inside and outside surfaces of laser fusion capsules [16,17] , which are multilayer structures and similar to the HSR. However, these methods cannot accurately measure millimeter shell thickness of the HSR due to the deficiency of a measurement reference and long measurement time.…”

Section: Introductionmentioning

confidence: 99%

A normal tracking differential confocal measurement method for multiple geometric parameters of hemispherical shell resonator with a common reference

Liu,

Zhang,

et al. 2024

Meas. Sci. Technol.

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This paper proposes a normal tracking differential confocal measurement method for the inside and outside surface profiles, shell thickness uniformity, and central asymmetry of inside and outside surfaces of the hemispherical shell resonator (HSR). A differential confocal technique with high-transmittance focusing ability is used to measure a single point on the inside and outside surfaces of the HSR. The normal alignment measurement technique is used to accurately measure the inside and outside surfaces and shell thickness of the HSR with a common reference in one measurement process. The HSR is step-rotated to synchronously collect information on the inside and outside surfaces, and using the differential confocal sensor to measure the different normal-section profiles. The experimental results indicate successful measurement of HSR central asymmetry. The repeated measurement accuracy for the inside and outside surface profiles and thickness uniformity is better than 30 nm.

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Section: Introductionmentioning

confidence: 99%