2019
DOI: 10.1107/s1600576719013311
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Fast fitting of reflectivity data of growing thin films using neural networks

Abstract: Artificial neural networks trained with simulated data are shown to correctly and quickly determine film parameters from experimental X-ray reflectivity curves.

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Cited by 38 publications
(44 citation statements)
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“…Advanced modeling and computer simulations are indispensable for deriving quantitative structural and dynamical information from scattering experiments. In this respect, the machine learning techniques are likely to be more exploited in the analysis of scattering data in the future [243,244]. The ultimate goal is to derive the real space images of functional systems with nanometer scale resolution from the scattering data by exploiting the coherence and inherent features within the scattering patterns.…”
Section: Discussionmentioning
confidence: 99%
“…Advanced modeling and computer simulations are indispensable for deriving quantitative structural and dynamical information from scattering experiments. In this respect, the machine learning techniques are likely to be more exploited in the analysis of scattering data in the future [243,244]. The ultimate goal is to derive the real space images of functional systems with nanometer scale resolution from the scattering data by exploiting the coherence and inherent features within the scattering patterns.…”
Section: Discussionmentioning
confidence: 99%
“…2 a, the conventional method of training for an ANN algorithm is shown, matching those in previous works 15 19 . A multilayer perceptron (MLP) type ANN algorithm was constructed and trained using Python, similarly to the previous work 15 , 17 , 19 . In the wavelength range of the spectrometer to be used for the CRM measurement, a wavelength range in which the intensity of the measured light is sufficiently greater than noise was selected, and the number of samples for that range was established as the number of input nodes.…”
Section: Methodsmentioning
confidence: 99%
“…Because the proposed method can basically offer strict validation of the ANN algorithms using certified values of the CRMs, it is not necessary to use validation data separately from ideally created reflectance spectra used for training datasets. The design parameters of the ANN algorithm were number of hidden layers (L = 1, 2, 3) and number of nodes in each layer (N = 50, 100, 150, 200), which were selected as simple cases based on the previous works 15 , 17 , 19 . Therefore, with the combination of these two parameters, 12 ANN algorithms were developed and then trained.…”
Section: Methodsmentioning
confidence: 99%
“…Previous studies showed that deep learning methods with convolutional neural network (CNN) models are highly effective for decreasing the noise from digital signals and images 18 – 23 ; therefore, a similar approach would also work for the NR experiments. A few applications of the machine learning in NR have been intended to directly determine the structure of the surface and interface of a specimen 24 26 . The current study introduces a deep learning approach that uses neural networks to restore the reflection profile hidden in the large statistical noise to overcome the limitation in the conventional NR methods.…”
Section: Introductionmentioning
confidence: 99%