Fast contact-mode atomic force microscopy on biological specimen by model-based control

A Tutorial on the Mechanisms, Dynamics, and Control of Atomic Force Microscopes

“…The advent of sensored X-Y stages has led to feedback control methods being developed for X-Y motions as well [87], [88]. Combined feedforward and feedback controllers have also been investigated for both the Z and X motions [89], [90], [91].…”

“…In commercial systems, the surface estimate comes from some function of the control signal. In some academic experiments, state-space methods are used to calculate the surface from an estimator [59], [89], [91]- [93]. Fig.…”

“…These include efforts geared at increasing the performance of conventional tube scanner-based microscopes through understanding and compensating for the nonlinear effects of hysteresis, creep, and varying voltage response [74], [102]. Many researchers have attacked the speed of measurement problem with approaches including a redesign of the actuator to achieve higher bandwidth [76], and applications of modern control theory to increase the scanning speed [74], [81], [82], [87], [88], [89]. These methods are discussed in more detail in [61].…”

“…In particular, the use of H ∞ in the feedback path only is described in [59], [87], [88] . The use of combined feedforward/feedback controllers is discussed using H ∞ [89], [91], ℓ 1 [90], and model-inverse based methods [68], [74]. Areas of future work are also outlined.…”

Combined Feedforward/Feedback Control of Atomic Force Microscopes

“…Schitter and others have also explored the use of SISO H ∞ feedforward controllers for motion in the X and Z directions [26], [27], where the feedforward filter F X is designed to minimize the H ∞ norm of…”