Dielectric metasurfaces are two-dimensional structures composed of nano-scatterers that manipulate phase and polarization of optical waves with subwavelength spatial resolution, enabling ultra-thin components for free-space optics. While high performance devices with various functionalities, including some that are difficult to achieve using conventional optical setups have been shown, most demonstrated components have a fixed functionality. Here we demonstrate highly tunable metasurface devices based on subwavelength thick silicon nano-posts encapsulated in a thin transparent elastic polymer. As proof of concept, we demonstrate a metasurface microlens operating at 915 nm, with focal distance tuning from 600 µm to 1400 µm through radial strain, while maintaining a diffraction limited focus and a focusing efficiency above 50%. The demonstrated tunable metasurface concept is highly versatile for developing ultra-slim, multi-functional and tunable optical devices with widespread applications ranging from consumer electronics to medical devices and optical communications.Metasurfaces are composed of a large number of discrete nano-scatterers (meta-atoms) that locally modify phase and polarization of light with subwavelength spatial resolution. The meta-atoms can be defined lithographically, thus providing a way to mass-produce thin optical elements [1][2][3][4] that could directly replace traditional bulk optical components or provide novel functionalities [4,5]. The two dimensional nature and the subwavelength thickness of metasurfaces make them suitable for tunable and reconfigurable optical elements. Some efforts have recently been focused on developing tunable and reconfigurable metasurfaces using different stimuli for tuning the meta-atoms. Examples include frequency response tuning using substrate deformation [6,7], refractive index tuning via thermo-optic effects [8,9], phase change materials [10,11], and electrically driven carrier accumulation [12,13].Stretchable substrates have been used to demonstrate tunable diffractive and plasmonic metasurface components [14][15][16], but they have exhibited low tunability, poor efficiency, polarization dependent operation, or significant optical aberrations. Here we present mechanically tunable dielectric metasurfaces based on elastic substrates, simultaneously providing a high tuning range, polarization independence, high efficiency, and diffraction limited performance. As a proof of principle, we experimentally demonstrate an aspherical microlens with over 130% focal distance tuning (from 600 µm to 1400 µm) while keeping high efficiency and diffraction limited focusing.Figure 1(a) shows a schematic of a metasurface microlens encapsulated in an elastic substrate with radius r and focal distance f . The phase profile of the lens has the following form, and is drawn in Fig. 1(c) (solid blue curve):where ρ is the distance to the center of the lens. Equation (1) in the paraxial approximation (ρ f ) reduces to By stretching the metasurface microlens with a stretch ratio o...