Fast analytical modelling of an SOI micro-ring resonator for bio-sensing application

Abstract

In this work, we present a closed-form model of silicon-on-insulator (SOI) micro-ring resonators, based on the conformal transformation method. We compute the propagation characteristics of the whispering gallery modes at resonance wavelengths. The results of the proposed model are compared to numerical simulations based on the finite element method (FEM). The proposed method allows comparable accuracy to that of FEM simulations, with a significant reduction in computer resource requirements (time, speed, memory). To further validate the proposed modelling, we also compare the modelling results to experimental data. Finally, we model a ring resonator for biosensing applications. We compute the bulk refractive index sensitivity (S), the figure of merit (FOM) and the intrinsic limit of detection (ILOD). In the geometry under study, our proposed model predicts an ideal ILOD of 3.73 × 10 −4 refractive index units, which is 0.24 smaller than what has been reported in SOI optimized structure. These results validate the proposed modelling technique for the fast design of optical biosensors where both the figure of merit and the geometries can be optimized.

Low temperature PECVD processes for the fabrication of integrated symmetrical resonant UV210 organic/semiconductor structures

“…This technology presents a strong light confinement due to the large refractive index difference between silica and silicon and a possible miniaturization due to the symmetrization of the structure rendering it advantageous for optoelectronic circuit. SOI structures have been investigated for optoelectronic devices in the field of telecommunication [36][37][38][39] and hold promise for sensing applications [40][41][42]. In such applications, the sensing structure placed between oxide silicon layers can be protected from potentially corrosive agents.…”

Hollow-Core Fiber-Based Biosensor: A Platform for Lab-in-Fiber Optical Biosensors for DNA Detection

“…In this scheme of detection, the bio/chemical analytes are directly detected without the laborious process of analyte molecule labeling [ 10 , 11 , 12 ]. Regarding their transducer part, optical biosensors are categorized into different groups of resonator-based [ 13 , 14 , 15 ], waveguide-based [ 16 , 17 ], and interferometric-devices based [ 18 , 19 ]. Although these optical sensors have demonstrated high sensitivities for both bulk and surface sensing measurements [ 20 , 21 , 22 ], they still suffer from a critical issue.…”

High sensitivity of room-temperature terahertz photodetector based on silicon

“…Among them, Silicon on Insulator (SOI) with a tri-layer structure of Si/SiO 2 /Si is the most promising silicon technology today ( Rudenko et al., 2020 ). SOI has been used in the manufacture of integrated circuits and key electronic components for many mainstream electronic applications, radio frequency front-end modules, chemical and biological integrated sensors, optical waveguides, and photonic circuits ( Lee et al., 2020 ; Tang et al., 2021 ; Khozeymeh et al., 2018 ; Zhang et al., 2020 ; Aalto et al., 2019 ). Compared with bulk Si, SOI has the advantages of faster operating speed, lower power consumption, and higher operating temperature ( Tibenszky et al., 2020 ; Dao et al., 2021 ; Ghosh and Iizuka, 2021 ).…”