Abstract:Adverse influences of organic contaminants on electronic devices have been studied and the results are reported. Contamination of silicon wafers by organic compounds during their manufacturing processes has been clearly demonstrated by a few surface analytical techniques. Silicon wafers were intentionally contaminated by one of the major contaminants, bis(2-ethylhexyl) phthalate; its incorporation into the silicon oxide layer during thermal oxidation of silicon and its influences on device performances have be… Show more
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