Journal of Materials Research and Technology
 2022
DOI: 10.1016/j.jmrt.2022.10.116
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Failure analysis on silicon semiconductor device materials: optical and high-resolution microscopic assessments

Subash C. B. Gopinath
1
,
Santheraleka Ramanathan
2
,
Mohd Najib Mohd Yasin
3
et al.
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