2010
DOI: 10.1016/j.ultramic.2010.08.001
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Factors affecting the accuracy of high resolution electron backscatter diffraction when using simulated patterns

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Cited by 125 publications
(111 citation statements)
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“…1 μm for this experimental set up). [45]. The direct pattern comparison to extract elastic strain and lattice rotation was developed initially by Wilkinson et al [40,46] and markedly improved and optimised in the past few years especially using robust fitting [42], pattern remapping routines to calculate strains in the presence of larger lattice rotations [43].…”
Section: Ebsd and Hr-ebsd Measurementmentioning
confidence: 99%
“…1 μm for this experimental set up). [45]. The direct pattern comparison to extract elastic strain and lattice rotation was developed initially by Wilkinson et al [40,46] and markedly improved and optimised in the past few years especially using robust fitting [42], pattern remapping routines to calculate strains in the presence of larger lattice rotations [43].…”
Section: Ebsd and Hr-ebsd Measurementmentioning
confidence: 99%
“…The value of 2.0 lm can be put into perspective by comparison to previous studies of precision in the EBSD method. 4,5,8,[12][13][14] In these investigations, minimum error values near 0.2%-0.5% of the pattern width (%100 lm) are quoted for the precision of the current standard methods of projection center determination. The error estimated for the setup used here indicates an improvement by at least one order of magnitude and is approaching values claimed for high-precision shadow-grid methods (0.5 lm 14 ) and for the moving screen technique combined with image correlation (theoretically <1 lm, but larger in practice due to optical and mechanical effects 13 ).…”
mentioning
confidence: 95%
“…2 As an accurate knowledge of the projection center is necessary to calibrate the angular coordinates of the Kikuchi pattern on the detector screen, a key problem in EBSD is the determination of the exact position of the electron beam spot relative to the detector. [2][3][4][5][6][7][8][9][10][11][12][13][14][15][16][17][18][19] We have previously used a digital hybrid pixel detector, Timepix, 20,21 in a SEM to obtain Kikuchi patterns from crystalline samples 22 by direct electron detection. Detailed investigations revealed that the Timepix detector response exhibits an underlying diffraction pattern even in the total absence of diffraction effects from the sample (see Fig.…”
mentioning
confidence: 99%
“…The use of simulations to generate the reference patterns is an obvious approach to solving the 'reference pattern problem' and has been explored by several groups [8,9]. The simulations must have sufficient fidelity and while crude kinematic methods are unacceptable, dynamical simulation show promise [8,9,10]. Aberrations in the EBSD detector optics can lead to significant artifacts in the measured strains [9] and so need to be determined and accounted for using methods given for example by Day [11].…”
mentioning
confidence: 99%
“…The simulations must have sufficient fidelity and while crude kinematic methods are unacceptable, dynamical simulation show promise [8,9,10]. Aberrations in the EBSD detector optics can lead to significant artifacts in the measured strains [9] and so need to be determined and accounted for using methods given for example by Day [11]. However, the remaining barrier to successfully using simulations is the limited accuracy of currently available methods for determining the camera geometry.…”
mentioning
confidence: 99%