2016
DOI: 10.1016/j.micromeso.2015.09.026
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Facile synthesis of nanoscale high porosity IR-MOFs for low-k dielectrics thin films

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Cited by 25 publications
(18 citation statements)
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“…Recent theoretical and experimental investigations have drawn the attention to nonfluorous and fluorous metal–organic frameworks as low‐κ materials. Fluorous metal–organic frameworks (FMOFs) and fluorous nonporous coordination polymers (FN‐PCPs) are potentially promising alternatives to current low‐κ dielectrics, as they possess a number of desirable traits in one material, namely: i) Controlled and reproducible chemical composition; ii) reproducible crystal structure, which allows controlled and reproducible physicochemical properties, which is not always the case with amorphous materials; iii) low adsorptivity of high‐κ species.…”
Section: Introductionmentioning
confidence: 99%
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“…Recent theoretical and experimental investigations have drawn the attention to nonfluorous and fluorous metal–organic frameworks as low‐κ materials. Fluorous metal–organic frameworks (FMOFs) and fluorous nonporous coordination polymers (FN‐PCPs) are potentially promising alternatives to current low‐κ dielectrics, as they possess a number of desirable traits in one material, namely: i) Controlled and reproducible chemical composition; ii) reproducible crystal structure, which allows controlled and reproducible physicochemical properties, which is not always the case with amorphous materials; iii) low adsorptivity of high‐κ species.…”
Section: Introductionmentioning
confidence: 99%
“…Despite these appealing premises, only few papers regarding MOFs and N‐PCPs as low‐κ dielectrics have appeared . A first point of reference was set by Zagorodniy et al These authors estimated static dielectric constants as low as 2.0 for a handful of Zn(II)‐carboxylate IRMOFs by applying the semiempirical Clausius–Mossotti approach, which neglected the orientation and distortion contributions to the molecular polarizability, influencing the value of κ at the frequencies at which microelectronic chips operate (10 5 –10 9 Hz).…”
Section: Introductionmentioning
confidence: 99%
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“…Metal-organic frameworks (MOFs) have drawn increasing attention owing to their high porosity and tunability. 7,8 Research concerning the application of MOFs in wastewater treatment is receiving attention. 9,10 MOF materials have been found to be effective and economical adsorbents for dyes in waste water.…”
Section: Introductionmentioning
confidence: 99%
“…The shape of these clusters can be assimilated to specific geometric structures, such as triangular ones, tetrahedral or octahedral in periodically organized systems. For example, among the most studied MOFs of transition metals, there are the MOF-5 and IRMOF-5, consisting of Zn 4 O-cluster sub-units with 1,4-benzendicarboxylic acid and Zn 4 O-clusters with 2,6-naphthalendicarboxylic acid [ 17 , 18 , 19 ].…”
Section: Introductionmentioning
confidence: 99%