Facile Phase Transition Measurements for Nanogram Level Liquid Samples Using Suspended Microchannel Resonators

Yun, Mi Young; Lee, Il; Jeon, Sangmin; Lee, Jungchul

doi:10.1109/jsen.2013.2287887

Cited by 14 publications

(5 citation statements)

References 26 publications

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“…This SMR can weigh single nanoparticles, single bacterial cells and sub-monolayers of adsorbed proteins in water with sub-femtogram resolution. More recently, the SMRs were successfully employed to measure liquid viscosities [ 164 ], temperature-dependent density and volume contraction of binary mixtures [ 165 ], temperature variations produced by the biological heat sources [ 166 ], to handle multiple viscous samples [ 167 ] and to examine phase transitions of two materials in liquid state [ 168 ]. Table 4 summarizes the comparison of some micro-and nanochannel resonators which were widely applied for density and viscosity measurements.…”

Section: Resonator Structures and Materialsmentioning

confidence: 99%

Tunable Micro- and Nanomechanical Resonators

Zhang

Peng

et al. 2015

Sensors

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Advances in micro- and nanofabrication technologies have enabled the development of novel micro- and nanomechanical resonators which have attracted significant attention due to their fascinating physical properties and growing potential applications. In this review, we have presented a brief overview of the resonance behavior and frequency tuning principles by varying either the mass or the stiffness of resonators. The progress in micro- and nanomechanical resonators using the tuning electrode, tuning fork, and suspended channel structures and made of graphene have been reviewed. We have also highlighted some major influencing factors such as large-amplitude effect, surface effect and fluid effect on the performances of resonators. More specifically, we have addressed the effects of axial stress/strain, residual surface stress and adsorption-induced surface stress on the sensing and detection applications and discussed the current challenges. We have significantly focused on the active and passive frequency tuning methods and techniques for micro- and nanomechanical resonator applications. On one hand, we have comprehensively evaluated the advantages and disadvantages of each strategy, including active methods such as electrothermal, electrostatic, piezoelectrical, dielectric, magnetomotive, photothermal, mode-coupling as well as tension-based tuning mechanisms, and passive techniques such as post-fabrication and post-packaging tuning processes. On the other hand, the tuning capability and challenges to integrate reliable and customizable frequency tuning methods have been addressed. We have additionally concluded with a discussion of important future directions for further tunable micro- and nanomechanical resonators.

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Section: Resonator Structures and Materialsmentioning

confidence: 99%

Tunable Micro- and Nanomechanical Resonators

Zhang

Peng

et al. 2015

Sensors

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“…Compared with biosensors not utilizing the principle of sensitive material vibration [ 107 , 108 ], these sensors exhibit superior sensitivity and selectivity, making them useful for disease diagnosis and drug discovery. In cases where chemicals need to react in liquid, mechanical resonators can integrate micro-nano channels, thus confining the fluid to internal channels to circumvent the influence of additional damping effects [ 109 ], as depicted in Figure 6 a. Micro-nano channel mechanical resonators can also be used for sorting, capturing, and manipulating microparticles like cells [ 110 , 111 , 112 ], and characterizing fluid density [ 113 ], fluid viscosity [ 114 ], fluid phase change [ 115 ], particle position [ 116 ], and so on. Precise vibration control can facilitate cell separation, reagent mixing, or enhancement of chemical reactions in micro-scale channels.…”

Section: Applications Of Fmprsmentioning

confidence: 99%

Flexural-Mode Piezoelectric Resonators: Structure, Performance, and Emerging Applications in Physical Sensing Technology, Micropower Systems, and Biomedicine

Cai,

Wang,

Cao

et al. 2024

Sensors

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Piezoelectric material-based devices have garnered considerable attention from scientists and engineers due to their unique physical characteristics, resulting in numerous intriguing and practical applications. Among these, flexural-mode piezoelectric resonators (FMPRs) are progressively gaining prominence due to their compact, precise, and efficient performance in diverse applications. FMPRs, resonators that utilize one- or two-dimensional piezoelectric materials as their resonant structure, vibrate in a flexural mode. The resonant properties of the resonator directly influence its performance, making in-depth research into the resonant characteristics of FMPRs practically significant for optimizing their design and enhancing their performance. With the swift advancement of micro-nano electronic technology, the application range of FMPRs continues to broaden. These resonators, representing a domain of piezoelectric material application in micro-nanoelectromechanical systems, have found extensive use in the field of physical sensing and are starting to be used in micropower systems and biomedicine. This paper reviews the structure, working principle, resonance characteristics, applications, and future prospects of FMPRs.

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“…Since most microfluidic platforms for thermophysical property measurements are not equipped with direct volume or mass measurements, their measurement results tend to be extensive and thus proportional to sample quantity. To integrate thermal sensing with gravimetric sensing metrology 7 – 10 , we recently introduced simultaneous, fast, and precise thermophysical property measurements using heated fluidic resonators (HFRs) 11 . With HFR, three intensive properties—thermal conductivity, specific heat capacity, and density—are simultaneously obtained by resistive heating/thermometry and resonant densitometry.…”

Section: Introductionmentioning

confidence: 99%

Advanced operation of heated fluidic resonators via mechanical and thermal loss reduction in vacuum

Ko,

Lee,

Lee

2023

Microsyst Nanoeng

Self Cite

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For simultaneous and quantitative thermophysical measurements of ultrasmall liquid volumes, we have recently developed and reported heated fluidic resonators (HFRs). In this paper, we improve the precision of HFRs in a vacuum by significantly reducing the thermal loss around the sensing element. A vacuum chamber with optical, electrical, and microfluidic access is custom-built to decrease the convection loss by two orders of magnitude under 10-4 mbar conditions. As a result, the measurement sensitivities for thermal conductivity and specific heat capacity are increased by 4.1 and 1.6 times, respectively. When differentiating between deionized water (H2O) and heavy water (D2O) with similar thermophysical properties and ~10% different mass densities, the signal-to-noise ratio (property differences over standard error) for H2O and D2O is increased by 9 and 5 times for thermal conductivity and specific heat capacity, respectively.

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Facile Phase Transition Measurements for Nanogram Level Liquid Samples Using Suspended Microchannel Resonators

Cited by 14 publications

References 26 publications

Tunable Micro- and Nanomechanical Resonators

Tunable Micro- and Nanomechanical Resonators

Flexural-Mode Piezoelectric Resonators: Structure, Performance, and Emerging Applications in Physical Sensing Technology, Micropower Systems, and Biomedicine

Advanced operation of heated fluidic resonators via mechanical and thermal loss reduction in vacuum

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