Facile integration of electro-optic SiO<sub>2</sub>/ITO heterointerfaces in MIS structures for CMOS-compatible plasmonic waveguide modulation
Nasir Alfaraj,
Charles Chih-Chin Lin,
Sherif Nasif
et al.
Abstract:By taking advantage of the absence of diffraction limit restrictions in plasmonic structures, strong modal confinement is made possible, paving the way for improved optical processes and miniaturized photonic circuit integration. Indium tin oxide (ITO) has emerged as a promising plasmonic material that serves as a relatively lowcarrier density Drude metal by its electro-optic tunability and versatility as an integrative oxide. We herein demonstrate the facile integration of SiO 2 /ITO heterointerfaces into met… Show more
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