Abstract:This study proposes a miniature and highly sensitive Fabry-Perot interferometer (FPI) based on aluminum -polyimide diaphragm integrated with a mass block for acceleration sensing. The composite diaphragms with a radius and thickness of 3.5 mm and 630 nm are manufactured by Micro-Electro-Mechanical System (MEMS) technology. To increase the adhesion of the polyimide diaphragm to silicon wafer and improve the quality of deflectable diaphragm, a 30-nm-thick aluminum diaphragm is first coated on the silicon wafer b… Show more
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