Fabrication technologies for microsystems utilizing photoetchable glass

Dietrich, T.; Ehrfeld, W.; Lacher, M.; Kramer, Marcus; Speit, B.

doi:10.1016/0167-9317(95)00295-2

Cited by 153 publications

(96 citation statements)

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“…For instance, photoresists respond to light by breaking or reforming bonds, leading to pattern formation in the material. Alternatively, LDW can cause defects in photoetchable glass ceramics 20 or other optical materials through single-and multiphoton mechanisms, 21 enabling novel applications in optical storage, 22 photonic devices, 23,24 and microfluidics.…”

Section: Laser Direct-write Modification (Ldwm)mentioning

confidence: 99%

Laser Direct-Write Processing

Arnold¹,

Piqué²

2007

MRS Bull.

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Direct-write techniques enable computer-controlled two-and three-dimensional pattern formation in a serial fashion. Among these techniques, the versatility offered by laser-based direct-write methods is unique, given their ability to add, remove, and modify different types of materials without physical contact between a tool or nozzle and the material of interest. Laser pulses used to generate the patterns can be manipulated to control the composition, structure, and even properties of individual three-dimensional volumes of materials across length scales spanning six orders of magnitude, from nanometers to millimeters. Such resolution, combined with the ability to process complex or delicate material systems, enables laser direct-write tools to fabricate structures that are not possible to generate using other serial or parallel fabrication techniques. The goal of the articles in this issue of MRS Bulletin is to illustrate the range of materials processing capabilities, fundamental research opportunities, and commercially viable applications that can be achieved using recently developed laser direct-write techniques. We hope that the articles provide the reader with a fresh perspective on the challenges and opportunities that these powerful techniques offer for the fabrication of novel devices and structures.

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Section: Laser Direct-write Modification (Ldwm)mentioning

confidence: 99%

Laser Direct-Write Processing

Arnold¹,

Piqué²

2007

MRS Bull.

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“…6,7 Since they possess similar physical, chemical, and electrical properties, we expect them to show similar behavior.…”

Section: Introductionmentioning

confidence: 99%

Holography in commercially available photoetchable glasses

Kösters¹,

Hsieh²,

Buse

2005

Appl. Opt.

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Volume holographic gratings are recorded and retrieved in two commercially available glasses: Schott Foturan and Hoya PEG3. These materials are photoetchable, which describes their major application, but they also allow storage of volume holograms without any chemical etching. The samples are illuminated with ultraviolet light at a wavelength of 325 nm and thermally processed to achieve a maximum diffraction efficiency of Ϸ9% for a 1-mm-thick sample. The two glasses show similar behavior; the diffraction efficiencies in Foturan tend to be slightly larger, whereas PEG3 tends to have weaker light scattering.

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“…This creates an invisible image on the substrate. Approximately 2 J/cm 2 of energy density is required to sufficiently structurize a 1 mm thick substrate [56]. A heat treatment cycle is then required to form large lithium metasilicate (Li 2 SiO 3 ) nuclei which etch nearly 20 times faster than the unprocessed glass in dilute HF acid.…”

Section: Photodefinable Glass Substratesmentioning

confidence: 99%

Microfabrication Techniques for Plastic Microelectromechanical Systems (MEMS)

Mastrangelo¹

2003

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Fabrication technologies for microsystems utilizing photoetchable glass

Cited by 153 publications

References 1 publication

Laser Direct-Write Processing

Laser Direct-Write Processing

Holography in commercially available photoetchable glasses

Microfabrication Techniques for Plastic Microelectromechanical Systems (MEMS)

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