“…Vapor-phase growth of MOFs is a rapidly expanding area, 20 as illustrated by reports on the deposition of ZIF-67, 21 CuBDC, 22 CuCDC, 22 HKUST-1, 23 and a Zn-carboxylate-pyrazolate MOF-5 isotype structure. 24 Furthermore, related approaches have been developed such as CVD of amorphous precursors followed by postdeposition crystallization to form MOF-5, 25 IRMOF-8, 26 UiO-66, 27 and UiO-66-NH 2 28 and the deposition of crystalline coordination compounds (e.g., MAF-252, 29 CaBDC, 30 and different CuBDC polymorphs 22,31 ). Moreover, MOF-CVD has been successfully implemented in the fabrication of sensors, 32 microsupercapacitors, 33,34 and gas separation membranes.…”