Fabrication of vanadium oxide thin film with high-temperature coefficient of resistance using V2O5/V/V2O5 multi-layers for uncooled microbolometers

Phase‐Selective CVD of Vanadium Oxide Nanostructures

“…At substrate temperatures higher than 600°C, the dominating phase is VO 2 which yields an experimental TCR value of -0.6 %, lower than the TCR-values (-1 to -6 %) reported in the literature. [13,29] …”

“…Technologically relevant material properties of vanadium oxide compounds rely on the respective electronic state of the vanadium ion that can appear in different valence configurations leading to various applications such as electrodes in batteries, [1][2][3] thermochromic windows or IR protective shields, [4][5][6][7] catalysts for the oxidation of NO x or hydrocarbons, [8][9][10][11][12] and infrared detectors. [13,14] Vanadium oxide phases have been synthesized as one-, two-or three-dimensional materials by several methods such as sol-gel or other wet chemical techniques, [14][15][16] pulsed laser deposition, [17,18] sputtering or physical vapor deposition. [13,14,19,20] Among vapor phase techniques, CVD is gaining increasing attention for the fabrication of VO x films.…”

“…[13,14] Vanadium oxide phases have been synthesized as one-, two-or three-dimensional materials by several methods such as sol-gel or other wet chemical techniques, [14][15][16] pulsed laser deposition, [17,18] sputtering or physical vapor deposition. [13,14,19,20] Among vapor phase techniques, CVD is gaining increasing attention for the fabrication of VO x films. [1,2,[4][5][6][21][22][23] Despite a large body of data available on vanadium oxide nanostructures, phase-selective synthesis of V x O y compounds poses a synthetic challenge mainly due to the structure complexity and facile phase transformation within the V-O binary system.…”

Group IV Materials for Low Cost and High Performance Bolometers

“…Some of the published data are addressed in table 1. Han, 2003;Moon, 2005). These oxide layers were deposited by reactive dc sputtering followed by an annealing treatment (673K).…”

Flexible platinum temperature sensor embedded in polyimide (PI) films for curved surface temperature monitoring applications: skin temperature of human body

“…Therefore, both Ptthin-film-based temperature sensors and polymer-film-based temperature sensors can be used in research to optimize and enhance the properties and create flexible and wearable applications. Additionally, temperature sensors using metal alloy (10,11) or ceramic (12)(13)(14) were developed to obtain high TCR. However, those sensors were fabricated on rigid substrates.…”