Fabrication of ultrathin metallic membranes on ceramic supports by sputter deposition

Palladium/Copper Alloy Composite Membranes for High Temperature Hydrogen Separation From Coal-Derived Gas Streams

“…These membranes have very high fluxes as shown in Figure 2. However, it was found that the required metal film thickness to produce a leak-free membrane was a function of the plating time as well as being influenced by the support choice [4,5]. In the absence of structural defects in the support, the nominal pore size and smoothness of the top layer are the most important factors determining the minimal thickness to produce a leak free metal membrane [2,5].…”

Nanomembrane: A New MEMS/NEMS Building Block

“…The porous substrate does not hinder the filtrate from passing through, while at the same time it ensures mechanical robustness. Some examples include polymer supports (Sackmann et al, 2000), ceramics (Jayaraman et al, 1995), zeolites (Tavolaro et al, 2007), etc. This Chapter is dedicated exclusively to nanomembranes as freestanding or free-floating structures which are robust enough to ensure self-support.…”

Preparation and characterization of palladium-based composite membranes by electroless plating and magnetron sputtering

“…It was suggested that the defects of the Pd composite membrane could have an effect on the value of the power of H 2 pressure. Li, et al [9,10] reported the H 2 permeation property of the thin (<0.5 m) Pd and Pd-Ag alloy composite membrane at the permeation temperatures of <300 • C. Those membranes were prepared by the sputtering technique. In their work, high the power of H 2 pressure (>0.5) was attributed to the surface adsorption/desorption steps of H 2 .…”

“…Electroless plating [3][4][5][6][7], sputtering [8][9][10] and chemical vapor deposition [11][12][13][14][15] have been explored to produce Pd-based composite membranes.…”