2019
DOI: 10.24996/ijs.2019.60.8.6
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Fabrication of TiO2 sensor using rapid breakdown anodization method to measure pressure, humidity and sense gases at room temperature

Abstract: Rapid breakdown anodization (RBA) process was used to fabricate TiO2 sensor to measure pressure and humidity and sense gases at room temperature. This chemical process transformed Ti to its oxide (TiO2) as a powder with amorphous phase as X ray diffraction (XRD) technique confirmed.  This oxide consisted from semi spherical nanoparticles and titania nanotubes (TNTs) as Scanning electron microscope (SEM) technique showed.  TiO2 powder was deposited on Ti substrates by using electrophoretic deposition (EPD) meth… Show more

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Cited by 9 publications
(6 citation statements)
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“…Produced TNPs had an amorphous structure. This result is in agreement with that obtained by (Reem et al, 2019). After heat treatment, LNTs had a polycrystalline structure with a dominant peak (110).…”
Section: Resultssupporting
confidence: 92%
“…Produced TNPs had an amorphous structure. This result is in agreement with that obtained by (Reem et al, 2019). After heat treatment, LNTs had a polycrystalline structure with a dominant peak (110).…”
Section: Resultssupporting
confidence: 92%
“…Vapor sensors are typically based on classic oxide materials such as ZnO developed by Nanto et al, SnO 2 developed by Liu et al, and WO 3 developed by Wang et al Other advanced but challenging FET-based devices in production were developed by Lundström et al along with capacitors developed by Winquist et al In ref , authors review most recent results in the field of nano-heterostructured materials for gas sensing including metal oxides and two-dimensional (2D) structures, demonstrating several limitations including operation at high temperatures and selectivity issues. Moreover, most of these together with other interesting approaches are found to be incompatible with the modern silicon technology.…”
Section: Introductionmentioning
confidence: 99%
“…Semiconductors are perfect materials for gas sensors; accordingly, their conductivity is based on the concentration of the gas in contact. Currently, semiconductors of metal oxides such as zinc oxide (ZnO), stannic oxide (SnO2), indium oxide (In2O3), and titanium dioxide (TiO2) have been utilized to reveal harmful gases [7][8][9][10][11][12]. TiO2 is highly applied as a material for gas sensing in order to detect harmful and toxic gases due to its excellent physicochemical properties.…”
Section: Introductionmentioning
confidence: 99%