Fabrication of three-dimensional microstructures by two-dimensional slice by slice approaching via focused ion beam milling

Fu, Yongqi; Bryan, Ngoi Kok Ann

doi:10.1116/1.1761460

Cited by 45 publications

(17 citation statements)

References 6 publications

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“…To evaluate the influence of the overlap effect under such condition the ion current was kept at 1 nA as that used in the above experiments. The variation rate of the ion dose is around 1.4 × 10 13 ions/ms as shown in Fig. 7.30b.…”

Section: Optimisation Of the Divergence Compensation Methodsmentioning

confidence: 89%

“…Redeposition effect and the influence of the scanning path were ignored. Fu et al [13] employed a two-dimensional slice-by-slice method to fabricate threedimensional structures by FIB. Sequential two-dimensional slices with small thicknesses were used to approach the desired three-dimensional structures.…”

Section: Determination Of Fabrication Parameters In Fib Machiningmentioning

confidence: 99%

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Deterministic Fabrication of Micro- and Nanostructures by Focused Ion Beam

Sun

Luo

2013

Lecture Notes in Nanoscale Science and Technology

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Focused ion beam (FIB) machining is an ideal technique for both micro-and nanofabrication. This chapter describes a deterministic fabrication approach to accurately obtain micro-and nanostructures. It starts with a detailed introduction of FIB machining mechanism, followed by a surface topography simulation method and a divergence compensation method. The effectiveness of this fabrication approach has been fully demonstrated through a number of experiments which show that the surface topography of the machined material can be precisely predicted; the divergence compensation method can reduce the machining error, and the machined surface form accuracy can be dramatically improved. Combining with other techniques, some hybrid manufacturing techniques based on FIB machining are also introduced.

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Section: Optimisation Of the Divergence Compensation Methodsmentioning

confidence: 89%

Section: Determination Of Fabrication Parameters In Fib Machiningmentioning

confidence: 99%

Deterministic Fabrication of Micro- and Nanostructures by Focused Ion Beam

Sun

Luo

2013

Lecture Notes in Nanoscale Science and Technology

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“…Focused ion beam direct writing method is found to be effective in MOE fabrication. Two-dimensional slice-by-slice approaching can be employed to facilitate three-dimensional micro optical elements' fabrication, including micro-diffraction lens and micro hybrid refractive--diffractive lens (Fu and Bryan 2004a), as shown in Fig. 15.…”

Section: Micro Optical Elementsmentioning

confidence: 99%

Focused Ion Beam Nanofabrication Technology

Xu¹,

Zeng²

2013

Handbook of Manufacturing Engineering and Technology

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Focused ion beam has become an increasingly popular tool for the manufacturing of various types of micro-/nanostructures and devices for different applications. In this chapter, the recent developments of the FIB technologies in the micro/nano manufacturing are presented in details. FIB technologies mainly involve four main approaches: imaging, milling, ion-induced deposition, and implantation. The working principle and key techniques underlying the four approaches are introduced with an emphasis on their abilities in micro-/nanofabrications. The application fields involving using the FIB micro-/nanofabrication technologies are also presented, such as micro optical elements, plasmonic lenses, etc. Concluding remarks and outlook of the future research on the FIB technologies in micro/nano manufacturing are provided at the end of the chapter.

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“…However, a method for the accurate fabrication of material surfaces is still a challenge for various applications. Several remarkable efforts have been made to achieve those goals, including the Slice by Slice approach of Y. Fu et al [10,11], the approach of variable pixel dwell time over the sample surface by Adams and Vasile et al [12,13], and the Simulation based method, hereafter simply SBM, by Kim et al [14,15]. In the former two efforts, redeposition flux that is generated during the sputter process was not considered, while in the latter redeposition flux is automatically included during the simulation process.…”

Section: Introductionmentioning

confidence: 99%

Practical Surface Sculpting Method for the Fabrication of Predefined Curved Structures using Focused Ion Beam

Kim¹

2016

Applied Science and Convergence Technology

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Surface erosion using focused ion beam irradiation is the most promising technology for the realization of micro/nanofabrication. However, accurate fabrication of predefined structures is still challenging. This article introduces a single step surface driving method to fabricated predefined curved structures. The previously reported multi step surface driving method (MSDM) has been modified so that a single ion dose profile can be used instead of multiple ion dose profiles. Experimental realization of the method is presented with the fabrication of predefined curved surfaces as well as reference to surface propagation theory. For the purpose of verification, simulations are performed on the basis of a sound mathematical model.

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Fabrication of three-dimensional microstructures by two-dimensional slice by slice approaching via focused ion beam milling

Abstract: Articles you may be interested inInvestigation of etching two-dimensional microhole lattice array on lithium niobate with focused ion beam for fabricating photonic crystals

Cited by 45 publications

References 6 publications

Deterministic Fabrication of Micro- and Nanostructures by Focused Ion Beam

Deterministic Fabrication of Micro- and Nanostructures by Focused Ion Beam

Focused Ion Beam Nanofabrication Technology

Practical Surface Sculpting Method for the Fabrication of Predefined Curved Structures using Focused Ion Beam

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