Fabrication of Three-Dimensional Metalized Movable Microstructures by the Combination of Two-Photon Microfabrication and Electroless Plating

Ikegami, Takashi; Stocker, Michael P.; Monaco, Kathleen; Fourkas, John T.; Maruo, Shoji

doi:10.7567/jjap.51.06fl17

Cited by 14 publications

(8 citation statements)

References 33 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…In addition, we have recently developed metallized micromachines driven by light [18,19]. Since conventional optically driven micromachines are made from photopolymer, their movable parts are attracted and manipulated by radiation pressure caused by refraction at the surface of a micromachine.…”

Section: 2mentioning

confidence: 99%

“…We employed an electroless copper plating process [18]. The detail of our procedure is as follows: after the fabrication of a 3D polymer microstructure, the sample is submerged in a 20% (v/v) solution of ethylene diamine (EDA) in ethanol for 30 min, which is followed by three 1 min rinses in water.…”

Section: Electroless Copper Plating Of 3d Polymer Microstructuresmentioning

confidence: 99%

“…The process of electroless plating of magnetite is similar to that of electroless copper plating described in Section 3.3 [18]. In our process, the same acrylic resin used for electroless copper plating is used.…”

Section: Magnetically Driven Micromachinesmentioning

confidence: 99%

See 2 more Smart Citations

Remotely Driven Micromachines Produced by Two-Photon Microfabrication

Taniguchi

Miyake

2016

Three-Dimensional Microfabrication Using Two-Photon Polymerization

Self Cite

View full text Add to dashboard Cite

Section: 2mentioning

confidence: 99%

Section: Electroless Copper Plating Of 3d Polymer Microstructuresmentioning

confidence: 99%

See 1 more Smart Citation

Remotely Driven Micromachines Produced by Two-Photon Microfabrication

Taniguchi

Miyake

2016

Three-Dimensional Microfabrication Using Two-Photon Polymerization

Self Cite

View full text Add to dashboard Cite

“…In general, the microstructures produced by two-photon microfabrication are made from photosensitive materials such as photopolymers [ 13 ], photoresists [ 14 ], biopolymers [ 15 ], and hybrid materials containing surface-modified nanoparticles [ 16 ]. In the past few years, as a method to activate or functionalize polymeric microstructures after their fabrication, electroless plating has attracted much attention, for its ability to metallize nonconductive materials, typically polymers [ 17 , 18 , 19 , 20 ]. We also have focused on this method, and fabricated metallized 3D movable microparts using electroless copper plating [ 18 ].…”

Section: Introductionmentioning

confidence: 99%

“…In the past few years, as a method to activate or functionalize polymeric microstructures after their fabrication, electroless plating has attracted much attention, for its ability to metallize nonconductive materials, typically polymers [ 17 , 18 , 19 , 20 ]. We also have focused on this method, and fabricated metallized 3D movable microparts using electroless copper plating [ 18 ]. The created microparts were successfully driven by scanning a low-power laser beam [ 12 ].…”

Section: Introductionmentioning

confidence: 99%

Magnetically Driven Micromachines Created by Two-Photon Microfabrication and Selective Electroless Magnetite Plating for Lab-on-a-Chip Applications

2017

Self Cite

View full text Add to dashboard Cite

We propose a novel method to fabricate three-dimensional magnetic microparts, which can be integrated in functional microfluidic networks and lab-on-a-chip devices, by the combination of two-photon microfabrication and selective electroless plating. In our experiments, magnetic microparts could be successfully fabricated by optimizing various experimental conditions of electroless plating. In addition, energy dispersive X-ray spectrometry (EDS) clarified that iron oxide nanoparticles were deposited onto the polymeric microstructure site-selectively. We also fabricated magnetic microrotors which could smoothly rotate using common laboratory equipment. Since such magnetic microparts can be remotely driven with an external magnetic field, our fabrication process can be applied to functional lab-on-a-chip devices for analytical and biological applications.

show abstract

Additive Manufacturing of 3D Luminescent ZrO₂:Eu³⁺ Architectures

Winczewski

Herrera

Cabriel

et al. 2022

Advanced Optical Materials

View full text Add to dashboard Cite

Such radiation has a long-lived 4f-4f transition, observed when evaluating lanthanides resulting in sharp narrowband emission. This light emission can be supported even when incorporating the lanthanide ion in a dispersion medium that acts as a host matrix with diverse functionalities. [7,9] Two host matrix types for lanthanide ions are identified, namely, organic [10] and inorganic materials. [7,11] Inorganic materials have high lattice-binding energy combined with rigidness; thus, in most cases, they show greater chemical and thermal resistance and photostability against continuous excitation than organic materials. [1,8] Highly crystalline inorganic host matrices are typically preferred to reduce point defects emissions. Hence, attention should be given to the crystallinity of the host material and the nonradiative multiphonon relaxation caused by the crystal lattice. [9] In practice, low phonon energy hosts are preferred to utilize the luminescent activator effectively. [7] However, the commonly used SiO 2 (≈1100 cm −1 stretching vibration) presents low lanthanide solubility, [12,13] leading to cluster formation at high dopant contents (10 18 cm −3 ), [14] quenching the lanthanide emission. [13] In photonics, a substitute for SiO 2 is ZrO 2 , which has relatively good transparency in the visible and infrared range and low phonon energy (≈470 cm −1 ). [12] ZrO 2 occurs in three polymorphs, tetragonal, monoclinic, and cubic, denoted t-ZrO 2 , m-ZrO 2 , and Implementation of more refined structures at the nano to microscale is expected to advance applications in optics and photonics. This work presents the additive manufacturing of 3D luminescent microarchitectures emitting light in the visible range. A tailor-made organo-metallic resin suitable for two-photon lithography is developed, which upon thermal treatment in an oxygen-rich atmosphere allows the creation of silicon-free tetragonal (t-) and monoclinic (m-) ZrO 2 . The approach is unique because the tailor-made Zrresin is different from what is achieved in other reported approaches based on sol−gel resins. The Zr-resin is compatible with the Eu-rich dopant, a luminescent activator, which enables to tune the optical properties of the ZrO 2 structures upon annealing. The emission characteristics of the Eu-doped ZrO 2 microstructures are investigated in detail with cathodoluminescence and compared with the intrinsic optical properties of the ZrO 2 . The hosted Eu has an orange−red emission showcased using fluorescence microscopy. The presented structuring technology provides a new platform for the future development of 3D luminescent devices.

show abstract

Fabrication of Three-Dimensional Metalized Movable Microstructures by the Combination of Two-Photon Microfabrication and Electroless Plating

Cited by 14 publications

References 33 publications

Remotely Driven Micromachines Produced by Two-Photon Microfabrication

Remotely Driven Micromachines Produced by Two-Photon Microfabrication

Magnetically Driven Micromachines Created by Two-Photon Microfabrication and Selective Electroless Magnetite Plating for Lab-on-a-Chip Applications

Additive Manufacturing of 3D Luminescent ZrO₂:Eu³⁺ Architectures

Contact Info

Product

Resources

About

Fabrication of Three-Dimensional Metalized Movable Microstructures by the Combination of Two-Photon Microfabrication and Electroless Plating

Cited by 14 publications

References 33 publications

Remotely Driven Micromachines Produced by Two-Photon Microfabrication

Remotely Driven Micromachines Produced by Two-Photon Microfabrication

Magnetically Driven Micromachines Created by Two-Photon Microfabrication and Selective Electroless Magnetite Plating for Lab-on-a-Chip Applications

Additive Manufacturing of 3D Luminescent ZrO2:Eu3+ Architectures

Contact Info

Product

Resources

About

Additive Manufacturing of 3D Luminescent ZrO₂:Eu³⁺ Architectures