Fabrication of Three-Dimensional Metalized Movable Microstructures by the Combination of Two-Photon Microfabrication and Electroless Plating

Abstract

We propose a method to fabricate three-dimensional (3D) metallic movable microparts by the combination of two-photon microfabrication and electroless plating. In this method, polymeric movable microparts with anchors made by two-photon microfabrication are metalized by electroless plating, and then the anchors are removed by laser ablation using a femtosecond pulsed laser. As a result, a metalized freely movable micropart whose motion is restricted to a shaft can be produced. We succeeded in fabricating sophisticated 3D metallic microrotors by adjusting the experimental conditions of both electroless copper plating and laser ablation. #

Femtosecond‐Laser Direct Writing of Metallic Micro/Nanostructures: From Fabrication Strategies to Future Applications

“…By controlling the experimental conditions, a wide variety of metallization reactions have been conducted successfully on the surface of different polymers. As a typical route, electroless plating has been widely employed for metal coating . For instance, Misawa and co‐workers first reported the coating of nickel on SU‐8 microstructures fabricated by TPP .…”

“…In addition to the abovementioned applications, the fabrication of metal structures via FsLDW has also demonstrated potential in various scientific fields, such as micromechanics (Figure i), and microsensors . For instance, by applying electroless copper plating on a prefabricated polymer template, Maruo and co‐workers fabricated 3D metallic movable microparts, such as a microrotor and a microscrew, which could potentially be used in MEMS or LoC systems . Duan and co‐workers prepared 3D micromachines by combining FsLDW and the electroless plating of nickel‐phosphorus .…”

“…i) Upper image: reproduced with permission. [] Copyright 2012, The Japan Society of Applied Physics; lower images: reproduced with permission. [] Copyright 2012, Wiley‐VCH.…”

Development of Functional Devices Using Micro/Nano Stereolithography and Moulding Techniques

“…An example is the development of hybrid resins mixed with such nano-materials as magnetic nanoparticles or carbon nano tubes [16,17]. Experimental microvalves using gels that swell according to pH have also been made [18], as have drug delivery devices using biopolymers mixed with dye [19]. We are also developing a photopolymerisable resin material capable of forming 3D structures of amorphous carbon when the resin is carbonised by heat treatment [20].…”

Low‐Distortion Surface Functionalization of Polymeric Microstructures

“…One simple and widely used method for aminating a polymeric surface or microstructure involves immersing it into a solution of an aminating agent dissolved in an organic solvent, such as EDA‐in‐ethanol . Although it is well established that treatment with ethanolic EDA and related methods are effective for aminating surfaces, little attention has been devoted to how these processes affect the form and integrity of a microstructure.…”