Fabrication of the Highly Ordered Silicon Nanocone Array With Sub-5 nm Tip Apex by Tapered Silicon Oxide Mask

Pan, Aixi; Zhu, Chenxu; Yan, Zheng; Zhu, Xiaoli; Liu, Zhongyi; Cui, Bo

doi:10.1109/tsm.2024.3372521

IEEE Trans. Semicond. Manufact.

2024

DOI: 10.1109/tsm.2024.3372521

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Fabrication of the Highly Ordered Silicon Nanocone Array With Sub-5 nm Tip Apex by Tapered Silicon Oxide Mask

Aixi Pan,

Chenxu Zhu,

Zheng Yan

et al.

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Fabrication of the Highly Ordered Silicon Nanocone Array With Sub-5 nm Tip Apex by Tapered Silicon Oxide Mask

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References 44 publications

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