Fabrication of Textured DLC Films Using Three-Dimensional Masking System

Abstract

Segment-structured diamond-like carbon (S-DLC) film, which is separated DLC films into small segments using metal mask, has been developed in order to improve its tribological property or accomplish multi-functionalized surface. Meanwhile, the S-DLC deposition by conventional methods using metal mesh as masks is difficult to apply to the three-dimensional substrates which have complicate curves. The purpose of this study is to develop coating methods for S-DLC deposition on the three-dimensional substrates like an aspect of the cylinder and a ball surface. In this study, we report the coating method using a robot employing six degrees of freedom (MOTOMAN-MH6: Yaskawa electric corporation) and a micro ink jet system (IJHB-1000 and IJHB-30: Microjet corporation). By adjusting the parameters applied to the piezoelectric element, the ink droplet was stable discharged. Then, small grid patterns were drawn on the plate. The substrate temperature is also controlled in order to make the drawn line thinner, because the resin ink is thermosetting material. Then, the DLC film was deposited onto the ink drawn substrate by a micro-pulse plasma CVD method using acetylene gas for 40 minutes. After the liftoff and the Raman spectroscopy measurement, we found that the resin ink could play a role as a mask material. Finally, grid patterns were successfully drawn on the aspect of the cylinder and a ball surface. In conclusion, it could be thought that this masking method could be used to various shape by complicating the robot programming in the future.

Tribological and thermal stability study of nanoporous amorphous boron carbide films prepared by pulsed plasma chemical vapor deposition

“…Due to their potential tribological applications, segment-structured surfaces have drawn much attention in recent years [1–6]. It is well known that the patterning of tribological coatings can further enhance the wear performance of an engineering surface.…”

“…However, increasing tribological demands of modern industries has pushed the segmented DLC film development to its limits. Furthermore, the fabrication of small segments using metal meshes as masks is difficult to apply on three-dimensional substrate shapes, and complex and costly procedures are needed [1, 4, 6]. To overcome these limitations, it may be possible to obtain a quasi-patterned surface by introducing porosity, which can have a tribological function similar to that of the segmented surfaces described above.…”

Fabrication of micro segment structured DLC film

“…The other is a mask process. The former method includes photolithography (Petterson and Jacobson, 2004) (Zhao, et al, 2013) and laser beam methods (Ding, et al, 2011), whereas the latter process includes a photolithography (Chouquet et al, 2010), a nanoimprinting, a mesh masking (Aoki and Ohtake 2004) and an inkjet method (Takashima, et al, 2011). With the exception of mesh masking, these methods are usually used for micromachining of electronic devices.…”