Journal of Vacuum Science &Amp; Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
 2006
DOI: 10.1116/1.2217975
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Fabrication of submicrometer patterned two-dimensional electron gases by overgrowth of focused ion beam doped AlxGa1−xAs

D. Reuter
1
,
C. Riedesel
2
,
A. D. Wieck
3

Abstract: Articles you may be interested inFabrication of two-dimensional electron systems by focused ion beam doping of III/V semiconductor heterostructures

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