Fabrication of single crystal diamond microchannels for micro-electromechanical systems

Fu, Jiao; Zhu, Tianfei; Zhang, M.H.; Zhang, X.; Li, Fengnan; Liu, Z.C.; Denu, Garuma Abdisa; Wang, Yafei; Shao, Guoqing; Chang, Xiaohui; Wang, W.; Zhang, J.W.; Wang, J.J.; Hou, Xun

doi:10.1016/j.diamond.2017.09.016

Cited by 9 publications

(2 citation statements)

References 17 publications

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“…The most common reported single crystal diamond microchannel fabrication were used ion beam lithography [5] and epitaxial lateral overgrowth techniques [6]. An article of micro-water jet guided laser perpendicular cutting trenches as a feasible way to fabricate single crystal diamond (SCD) microchannel has been reported [7], but the surface quality of that type of microchannel has not been improved and the defects have not been inhibited.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of Micron Scale Three-Dimensional Single Crystal Diamond Channel: by Micro-Jet Water-Assist Laser

Wei¹,

Zhang²,

Lin³

et al. 2021

Preprint

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Two types of trenches cross-section in conventional vertical and brand new reverse-V-shape have fabricated on SCD substrate by micro-jet water-assist laser, the epitaxial lateral overgrowth technique has applied by microwave plasma chemical vapor deposition system in forming multiple micrometer-size channels. Raman and SEM techniques have applied in analyze both types growth layer characterization. Optical microscope has used to test microchannels hollowness. As a result, with the brand new reverse-V-shape trench, epitaxial lateral overgrowth layer reaches higher SCD surface morphology and crystal quality.

show abstract

Section: Introductionmentioning

confidence: 99%

Fabrication of Micron Scale Three-Dimensional Single Crystal Diamond Channel: by Micro-Jet Water-Assist Laser

Wei¹,

Zhang²,

Lin³

et al. 2021

Preprint

View full text Add to dashboard Cite

show abstract

“…Ion beam lithography is the most commonly documented method of fabricating single-crystal diamond microchannels [ 12 , 13 ], and microstructures are prepared on diamond substrates by femtosecond laser technique [ 14 , 15 ]. At the same time, epitaxial lateral overgrowth techniques are adopted to form closed channels [ 16 , 17 , 18 ]. Cutting trenches using a perpendicular micro-jet water-guided laser as a feasible means of fabricating a single crystal diamond (SCD) microchannel has been reported [ 19 ]; however, the surface quality of this type of microchannel was not improved, and defects remained.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of a Micron-Scale Three-Dimensional Single Crystal Diamond Channel Using a Micro-Jet Water-Assisted Laser

et al. 2021

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Two types of a trench with conventional vertical and new reverse-V-shaped cross-sections were fabricated on single crystal diamond (SCD) substrate using a micro-jet water-assisted laser. In addition, a microwave plasma chemical vapor deposition device was used to produce multiple micrometer-sized channels using the epitaxial lateral overgrowth technique. Raman and SEM methods were applied to analyze both types of growth layer characterization. The hollowness of the microchannels was measured using an optical microscope. According to the findings, the epitaxial lateral overgrowth layer of the novel reverse-V-shaped trench produced improved SCD surface morphology and crystal quality.

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Fabrication of microchannels in single crystal diamond for microfluidic systems

Liu

Zhu

et al. 2018

Microfluid Nanofluid

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Fabrication of single crystal diamond microchannels for micro-electromechanical systems

Cited by 9 publications

References 17 publications

Fabrication of Micron Scale Three-Dimensional Single Crystal Diamond Channel: by Micro-Jet Water-Assist Laser

Fabrication of Micron Scale Three-Dimensional Single Crystal Diamond Channel: by Micro-Jet Water-Assist Laser

Fabrication of a Micron-Scale Three-Dimensional Single Crystal Diamond Channel Using a Micro-Jet Water-Assisted Laser

Fabrication of microchannels in single crystal diamond for microfluidic systems

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