Fabrication of silicon tip array and its application in vacuum microelectronic accelerometer

Dongling, 李东玲 Li; Zhengguo, 尚正国 Shang; Shengqiang, 王胜强 Wang; Zhiyu, 温志渝 Wen

doi:10.3788/hplpb20152702.24113

强激光与粒子束

2015

DOI: 10.3788/hplpb20152702.24113

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Fabrication of silicon tip array and its application in vacuum microelectronic accelerometer

李东玲 Li Dongling¹,

尚正国 Shang Zhengguo²,

王胜强 Wang Shengqiang³

et al.

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Fabrication of silicon tip array and its application in vacuum microelectronic accelerometer

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