Fabrication of silicon slanted grating by using modified thermal deposition technique to enhance fiber-to-chip coupling

Butt, Muhammad Ali; Verma, Payal; Rasshchepkina, N. A.; Soloviev, Vladimir; Kazanskiy, Nikolay L.; Скиданов, Р. В.; Хонина, С. Н.; Полетаев, Сергей Дмитриевич; Подлипнов, В. В.; Fomchenkov, Sergey A.; Тимошенков, С. П.; Timoshenkov, A. S.; Vinogradov, A. I.

doi:10.1109/microcom.2016.7522501

Cited by 2 publications

(2 citation statements)

References 14 publications

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“…Lee et al [10] developed a deposition system based on the GLAD technique combined with e-beam evaporation for highly sensitive fire detectors. Butt et al [25] fabricated fibre-to-chip coupling with slanted binary grating by applying certain modifica- The principle of this method is based on the deposition of the film at various angles, assuming that the path of the vapour with respect to the substrate is not parallel. The dimensions of the resulting column, as well as the thickness of the material, are controlled by varying the rate of rotation and the angle of inclination of the substrate.…”

Section: Introductionmentioning

confidence: 99%

“…Lee et al [10] developed a deposition system based on the GLAD technique combined with e-beam evaporation for highly sensitive fire detectors. Butt et al [25] fabricated fibre-to-chip coupling with slanted binary grating by applying certain modifications to the PhiSweep GLAD method. The authors tested the system for the deposition of a variety of columnar nanostructures, including nanorods, nanozigzags, and nanohelixes.…”

Section: Introductionmentioning

confidence: 99%

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Developing GLAD Parameters to Control the Deposition of Nanostructured Thin Film

Bronicki

Grochala

Rydosz

2022

Sensors

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In this paper, we describe the device developed to control the deposition parameters to manage the glancing angle deposition (GLAD) process of metal-oxide thin films for gas-sensing applications. The GLAD technique is based on a set of parameters such as the tilt, rotation, and substrate temperature. All parameters are crucial to control the deposition of nanostructured thin films. Therefore, the developed GLAD controller enables the control of all parameters by the scientist during the deposition. Additionally, commercially available vacuum components were used, including a three-axis manipulator. High-precision readings were tested, where the relative errors calculated using the parameters provided by the manufacturer were 1.5% and 1.9% for left and right directions, respectively. However, thanks to the formula developed by our team, the values were decreased to 0.8% and 0.69%, respectively.

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Section: Introductionmentioning

confidence: 99%

“…Lee et al [10] developed a deposition system based on the GLAD technique combined with e-beam evaporation for highly sensitive fire detectors. Butt et al [25] fabricated fibre-to-chip coupling with slanted binary grating by applying certain modifications to the PhiSweep GLAD method. The authors tested the system for the deposition of a variety of columnar nanostructures, including nanorods, nanozigzags, and nanohelixes.…”

Section: Introductionmentioning

confidence: 99%

Developing GLAD Parameters to Control the Deposition of Nanostructured Thin Film

Bronicki

Grochala

Rydosz

2022

Sensors

View full text Add to dashboard Cite

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Analysis of diffraction efficiency of phase gratings in dependence of grooves number

Meshalkin

Losmanschii

Cazac

et al. 2020

2020 International Conference on Information Technology and Nanotechnology (ITNT)

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The analysis of dependence of diffraction efficiency on number of grooves of phase gratings with sinusoidal profile was performed by means of specially designed program. An Angular Spectrum method applied for monochromatic light propagation in far field through phase grating was used for calculation of diffraction efficiency of gratings. Diffraction efficiency maps of 0-5th diffraction orders were obtained for different number of grooves (from 0 to 1000). It is shown that changing the number of grooves makes it possible to tune smoothly the diffraction efficiency.

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Fabrication of silicon slanted grating by using modified thermal deposition technique to enhance fiber-to-chip coupling

Cited by 2 publications

References 14 publications

Developing GLAD Parameters to Control the Deposition of Nanostructured Thin Film

Developing GLAD Parameters to Control the Deposition of Nanostructured Thin Film

Analysis of diffraction efficiency of phase gratings in dependence of grooves number

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