Fabrication of silicon nanowires based on-chip micro-supercapacitor

Soam, Ankur; Arya, Nitin; Singh, Anand Pratap; Dusane, Rajiv O.

doi:10.1016/j.cplett.2017.04.019

Cited by 33 publications

(14 citation statements)

References 24 publications

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“…f) Areal capacitance versus scan rate at different working temperatures, 0 C (black square), 20 C (red triangle) and 80 C (blue circle) respectively. average values depending on morphological characteristics of SiNWs and electrochemical conditions) [16], ionic liquids (PYR 13 TFSI, AC: 23 mF cm À2 or EMIM TFSI, AC: 13 mF cm À2 ) [5,33], or ionogels (AC: 60 mF cm À2 ) [8] electrolytes. This tendency demonstrates the potential of this mixture for micro-supercapacitor applications.…”

Section: Resultsmentioning

confidence: 99%

New electrolyte mixture of propylene carbonate and butyltrimethylammonium bis(trifluoromethylsulfonyl)imide (N1114 TFSI) for high performance silicon nanowire (SiNW)-based supercapacitor applications

Lé

Gentile

Bidan

et al. 2017

Electrochimica Acta

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New electrolyte mixture of propylene carbonate and butyltrimethylammonium bis(trifluoromethylsulfonyl)imide (N 1114 TFSI) for high performance silicon nanowire (SiNW)-based supercapacitor applications. Electrochimica Acta, Elsevier, 2017, 254, pp.Keywords: supercapacitors ionic liquid electrolyte mixture temperature A B S T R A C TThe use of a mixture of propylene carbonate (PC) and N 1114 TFSI ionic liquid (50:50% w.t) has been investigated as an optimal electrolyte for symmetric micro-supercapacitors based on SiNWs using a large and stable cell voltage of 3.5 V. The device showed an areal capacitance of 150 mF cm À2 , an energy density of 1 mJ cm À2 and a power density of 16 mW cm À2 maintaining an outstanding cycling stability after 3Á10 6 galvanostatic charge-discharge cycles at room temperature. Such properties were comparable to those obtained using the pure ionic liquid. Additionally, the excellent electrochemical performances reported in this study reflect the potential of such mixture to be employed as a promising electrolyte in wide operating temperatures ranging from 0 to 80 C at large electrochemical windows.

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Section: Resultsmentioning

confidence: 99%

New electrolyte mixture of propylene carbonate and butyltrimethylammonium bis(trifluoromethylsulfonyl)imide (N1114 TFSI) for high performance silicon nanowire (SiNW)-based supercapacitor applications

Lé

Gentile

Bidan

et al. 2017

Electrochimica Acta

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“…Besides, our prototypes exhibited extremely super-hydrophobic properties with a contact angle over ~165.6° without applying any hydrophobic chemical treatment, resulting in bouncing off the surface properties of the water droplets. These results render the fabricated silicon nanowire a pretty promising solution for various applications, including developing novel photothermal [ 5 , 6 , 36 , 37 ] and photocatalysis processes [ 38 , 39 ], supercapacitor electrodes [ 40 , 41 , 42 ], and microfluidic devices [ 43 , 44 , 45 ].…”

Section: Discussionmentioning

confidence: 99%

Fabrication of Needle-Like Silicon Nanowires by Using a Nanoparticles-Assisted Bosch Process for Both High Hydrophobicity and Anti-Reflection

Zhang

2021

Micromachines

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In this work, a modified Bosch etching process is developed to create silicon nanowires. Au nanoparticles (NPs) formed by magnetron sputtering film deposition and thermal annealing were employed as the hard mask to achieve controllable density and high aspect ratios. Such silicon nanowire exhibits the excellent anti-reflection ability of a reflectance value of below 2% within a broad light wave range between 220 and 1100 nm. In addition, Au NPs-induced surface plasmons significantly enhance the near-unity anti-reflection characteristics, achieving a reflectance below 3% within the wavelength range of 220 to 2600 nm. Furthermore, the nanowire array exhibits super-hydrophobic behavior with a contact angle over ~165.6° without enforcing any hydrophobic chemical treatment. Such behavior yields in water droplets bouncing off the surface many times. These properties render this silicon nanowire attractive for applications such as photothermal, photocatalysis, supercapacitor, and microfluidics.

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“…As widely used substance, nanosized carbon features are brought into fabricating MSCs, such as quantum dots, carbon onion, nanotubes, nanowires, and graphene sheets. [28][29][30][31]6] Pseudo-capacitive metal oxides, metal hydroxides, MXenes, and conductive polymers are also used to prepare hybrid active mass with excellent electrochemical behavior. [32][33][34][35] Recently, 3D hierarchical porous material was suggested as potential active mass for energy-storing applications regarding the unique hierarchical pore size and distribution, although there still remains a gap between synthesis and integration into the microdevice.…”

Section: Strategies To Improve Msc Performancementioning

confidence: 99%

“…Via composition and intercalation, nanostructured 3D hybrid materials are formed with well‐controlled morphology and porosity to fulfill requirements. As widely used substance, nanosized carbon features are brought into fabricating MSCs, such as quantum dots, carbon onion, nanotubes, nanowires, and graphene sheets . Pseudo‐capacitive metal oxides, metal hydroxides, MXenes, and conductive polymers are also used to prepare hybrid active mass with excellent electrochemical behavior .…”

Section: Performance Of Mscsmentioning

confidence: 99%

On‐Chip Microsupercapacitors: From Material to Fabrication

Wang

Zhang

2019

Energy Tech

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Microsupercapacitors (MSCs) are integrated into microdevices or chip‐based systems to store energy and power the chip efficiently, as they present excellent performance capabilities including high power density, fast charge/discharge rate, and long cycle time. Providing sufficient surface area and high electric conductivity are effective ways to enhance ion diffusion and charge transportation in electrodes, which in turn leads to high performance behavior. Herein, the novel progress of on‐chip MSCs in the past few years ranging from active materials synthesis to high‐resolution fabrication techniques is summarized, and the strategies to enhance the performance of MSCs are focused upon. From conventional materials to nanocomposite hybrid structures, the main active materials for MSC electrodes and the related fabrication techniques are reviewed in detail according to their different electrochemical performance. It is concluded that hierarchical porous‐structured materials and high‐resolution fabrication processes are of great importance in constructing high‐performance devices, which also demonstrates the future developing direction of on‐chip energy devices. The new developments of fabrication technologies such as microfabrication, laser direct writing, and inkjet printing are also discussed to show their advantages in forming high‐performance electrodes.

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Fabrication of silicon nanowires based on-chip micro-supercapacitor

Cited by 33 publications

References 24 publications

New electrolyte mixture of propylene carbonate and butyltrimethylammonium bis(trifluoromethylsulfonyl)imide (N1114 TFSI) for high performance silicon nanowire (SiNW)-based supercapacitor applications

New electrolyte mixture of propylene carbonate and butyltrimethylammonium bis(trifluoromethylsulfonyl)imide (N1114 TFSI) for high performance silicon nanowire (SiNW)-based supercapacitor applications

Fabrication of Needle-Like Silicon Nanowires by Using a Nanoparticles-Assisted Bosch Process for Both High Hydrophobicity and Anti-Reflection

On‐Chip Microsupercapacitors: From Material to Fabrication

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