Fabrication of silicon micro-mould for polymer replication using focused ion beam

Kim, C. S.; Park, J.; Chu, Wujin; Jang, Dong Kee; Kim, S. D.; Ahn, Sung‐Hoon

doi:10.1016/j.mee.2008.12.081

Cited by 11 publications

(4 citation statements)

References 22 publications

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“…Nanoscale phenomena are influenced by ion beam parameters (ion energy and current), milling parameters (dwell time and beam overlap), and the target material [37]. Many researchers have investigated in process control and planning in order to avoid the defects in FIB milling [45,46]. For further improvements, a novel processing strategy is required to minimize or control the defect.…”

Section: Critical Defects In Integrationmentioning

confidence: 99%

Hybrid 3D printing by bridging micro/nano processes

Yoon

Jang

Kim

et al. 2017

J. Micromech. Microeng.

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The aim of this work was to develop a novel hybrid manufacturing method for nanoscale three-dimensional (3D) printing with multi-material capabilities. 3D structuring methods at the micro/nanoscale are major goals of various engineering fields, and much work has been carried out to improve the minimum feature size, geometrical complexity, and material selection. With the aim of nanoscale multimaterial printing, a hybrid process was reported with an integrated nanoparticle deposition system (NPDS) and focused ion beam (FIB) system; however this process has limitations in terms of surface roughness and control over the layer thickness, as well as with the process scale, and furthermore, lack of sacrificial layers.In this dissertation, a novel hybrid process is described, which combines aerodynamically focused nanoparticle (AFN) printing, micro-machining and focused ion beam (FIB) milling. AFN printing is based on NPDS, and micromachining was used for local planarization. In addition to these processes, spincoating was used to fabricate sacrificial layers. By bridging these different II micro/nanoscale processes, the resulting hybrid process can address the limitations of the individual processes.To create the hybrid process, each process was investigated to enable compatibility. With the AFN printing system, the surface morphology of a detached substrate was observed, and the bonding mechanism between the substrate and nanoparticles was investigated. A novel printing strategy was identified to reduce the scale of the process. With the micro-machining system, different tool geometries were investigated. Complex geometries inspired by conventional-scale tools were implemented on the micro-scale, and their effects were investigated. With the FIB system, material re-deposition phenomena were investigated to reduce defects that occur during ion sputtering. A novel path-generation strategy was identified and investigated for different scanning paths.Process capability is discussed using fabrication examples and functional applications. The novel hybrid process represents a significant advance in the state of the art, and enables far improved process scales or dimensional degree of freedom, without losing the advantages of broad choice of materials.3D-pinted micro bi-material cantilevers were fabricated as a thermal actuator.The mechanical and thermal properties of the structure were investigated using an in-situ measurement system, and irregular thermal phenomena were analyzed. It is expected that these in-situ measurements of the 3D printed microstructure will contribute to materials research.Various 3D structures can be fabricated using the process described here from a range of metal/ceramic inorganic materials, including polymers. In particular, it is expected that the process will contribute to the area of customized nanoscale structuring, with potential applications in medical treatments. It is also expected that this work will contribute to further improvements in manufacturing technology by combining different m...

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Section: Critical Defects In Integrationmentioning

confidence: 99%

Hybrid 3D printing by bridging micro/nano processes

Yoon

Jang

Kim

et al. 2017

J. Micromech. Microeng.

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“…For circular patterns, a spiral scanning routine can significantly reduce the amount of redeposition. Based on Fu and Hopman's methods, Kim et al [23] chose a continuous slicing method which used spiral scanning as a part of the vector scan instead of using a raster scan to produce accurate circular patterns. Rather than using a discrete slice-by-slice process, the circular structure was fabricated in a contiguous way where the ion beam followed a spiral routine; therefore, stair-step structures on the sidewall were avoided.…”

Section: Determination Of Fabrication Parameters In Fib Machiningmentioning

confidence: 99%

Deterministic Fabrication of Micro- and Nanostructures by Focused Ion Beam

Sun

Luo

2013

Lecture Notes in Nanoscale Science and Technology

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Focused ion beam (FIB) machining is an ideal technique for both micro-and nanofabrication. This chapter describes a deterministic fabrication approach to accurately obtain micro-and nanostructures. It starts with a detailed introduction of FIB machining mechanism, followed by a surface topography simulation method and a divergence compensation method. The effectiveness of this fabrication approach has been fully demonstrated through a number of experiments which show that the surface topography of the machined material can be precisely predicted; the divergence compensation method can reduce the machining error, and the machined surface form accuracy can be dramatically improved. Combining with other techniques, some hybrid manufacturing techniques based on FIB machining are also introduced.

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“…Lee et al [17] have developed micro-lens array by hot embossing process using a microstructured anodic aluminum oxide (AAO) mold on polymer and multiscale structure fabricated as an essential component for microoptical applications. Kim et al [18] have reported the fabrication of a microscale hole/mold with circular structure on a silicon substrate. Shin et al [19] have developed 3 × 3 array of micro-holes on the surface of a SiC with optimal experimental conditions with hole diameter of 700 μm and depth of 900 μm.…”

Section: Introductionmentioning

confidence: 99%

Effect and optimization of photochemical machining process parameters for manufacturing array of micro-hole

Agrawal

Kamble

2019

J Braz. Soc. Mech. Sci. Eng.

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The stainless steel-304 is used in various surgical instruments due to its low carbon content and better corrosion resistance. SS-304 is machined using photochemical machining process (PCM) to obtain the components with micro-dimensions. The statistical methods of signal-to-noise (S/N) ratio and the analysis of variance (ANOVA) are applied to investigate effect of concentration of etchant, time of etching and temperature of etchant using DoE (L 27) orthogonal array. The performance characteristics like material removal rate (MRR), surface roughness (R a), undercut (U C) and etch factor (EF) are optimized during the investigation. The ANOVA technique is used to evaluate significance and percentage contribution of each parameter. The regression model for PCM of SS-304 is developed. The ANN technique is used to compare the predicted and experimental results of machining. The MRR, R a , EF and U C are showing improvement of 0.38 mm 3 /min, 1.271 µm, 0.11 and 0.028 mm, respectively, after the confirmatory test. The developed model is used to manufacture the array of micro-holes (5 × 5) with hole size of 220 µm, 280 µm and 370 µm which are used for metering of medicine in biomedical applications.

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Fabrication of silicon micro-mould for polymer replication using focused ion beam

Cited by 11 publications

References 22 publications

Hybrid 3D printing by bridging micro/nano processes

Hybrid 3D printing by bridging micro/nano processes

Deterministic Fabrication of Micro- and Nanostructures by Focused Ion Beam

Effect and optimization of photochemical machining process parameters for manufacturing array of micro-hole

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