Fabrication of precise microchannels using a side-insulated tool in a spark assisted chemical engraving process

Saranya, S.; Sankar, A. Ravi

doi:10.1080/10426914.2017.1401728

Cited by 28 publications

(15 citation statements)

References 17 publications

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“…Besides, the spark discharges on the tool sidewall can bring the tool wear to make it turn into a circular cone shape. The specially-designed tool electrode coated with an insulator film can confine the discharges only to the tool tip [13], thus the side wear of tool electrode can be efficiently avoided. Recent research found the stable discharges would make the tool wear more uniform if gas bubbles could be produced more uniformly around the tool-tip [14].…”

Section: Introductionmentioning

confidence: 99%

Reducing Tool-Tip Wear in Micro ECDM Scanning Process with Feedback Control of Flexible Contact Force

Nawaz¹,

Cao²,

Tong

et al. 2023

Preprint

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While machining the quartz glass in micro ECDM (electrochemical discharge machining) scanning process, the wear of tool electrode is adverse to machining accuracy. In this research, the developed spindle with servo feedback control of flexible force is used to avoid the instantaneous change of contact force that leads to the bending of tool electrode when the machining surface is uneven. The basic experiments are carried out through optimizing the processing parameters of open-circuit voltage, scanning speed, and scanning time, and then the mechanism and key influential factors of tool wear are analyzed. It is found that the tool wear is caused by the chemical reaction, the heat from discharges, and the friction between tool-electrode tip and workpiece surface. Therefore, three methods for reducing the tool wear are proposed and experimented. Method I: the low temperature electrolyte is applied in increasing the heat dissipation ratio of the tool-tip. Method II: the side wall of tool electrode is insulated by an oil film to constrain spark discharges only at the tool-tip bottom. Method III: more bubbles are pumped to promote the formation of gas film and the electrolyte renewal. Experimental results show the tool wear can be obviously reduced, so the machining accuracy of micro structures on quartz glass is improved in micro ECDM scanning process.

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Section: Introductionmentioning

confidence: 99%

Reducing Tool-Tip Wear in Micro ECDM Scanning Process with Feedback Control of Flexible Contact Force

Nawaz¹,

Cao²,

Tong

et al. 2023

Preprint

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“…Such applications usually require transferring the heat from one side of the component to the opposite end by the flow of different fluids. Heat transfer is carried out through various types of micro-fluidic structures/features, amongst which the micro-channel is the most widely used feature [1,2]. Various types of materials can be found to be used for the fabrication of micro-channels including metals, alloys, and non-metals.…”

Section: Introductionmentioning

confidence: 99%

“…Micro-milling, lithography, embossing [16], ultra-precision machining, multi-cutter milling [17] and [5], laser beam machining (LBM), electrochemical machining (ECM) [18], photochemical machining (PCM) [19], hybrid machining [1], and some others are the reported methods to produce micro-channels on variety of substrate materials. PCM, LBM, and ECM are very well-known processes to produce very thin micro-channels (even down to 100 µm) but these processes are not very suitable to achieve high aspect-ratio micro-channels [20].…”

Section: Introductionmentioning

confidence: 99%

WEDM of Copper for the Fabrication of Large Surface-Area Micro-Channels: A Prerequisite for the High Heat-Transfer Rate

et al. 2020

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To get the maximum heat transfer in real applications, the surface area of the micro-features (micro-channels) needs to be large as possible. It can be achieved by producing a maximum number of micro-channels per unit area. Since each successive pair of the micro-channels contain an inter-channels fin, therefore the inter-channels fin thickness (IFT) plays a pivotal role in determining the number of micro-channels to be produced in the given area. During machining, the fabrication of deep micro-channels is a challenge. Wire-cut electrical discharge machining (EDM) could be a viable alternative to fabricate deep micro-channels with thin inter-channels fins (higher aspect ratio) resulting in larger surface area. In this research, minimum IFT and the corresponding machining conditions have been sought for producing micro-channels in copper. The other attributes associated with the micro-channels have also been deeply investigated including the inter-channels fin height (IFH), inter-channels fin radius (IFR) and the micro-channels width (MCW). The results reveal that the inter-channels fin is the most critical feature to control during the wire electrical discharge machining (WEDM) of copper. Four types of fin shapes have been experienced, including the fins: broken at the top end, deflected at the top end, curled bend at the top, and straight with no/negligible deflection.

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“…The industrial applicability of electrically non-conductive materials (e.g., glass, quartz and silicon) is increasing exponentially in the applications such as microfluidics, bio-MEMS, micro heat exchanger, lab-on-chip devices, etc. [1][2][3]. Glass is preferable work material for the aforesaid applications due to its high corrosion resistance, wear resistance, chemical resistance, high strength and thermal resistance.…”

Section: Introductionmentioning

confidence: 99%

Effect of tool materials on performance of rotary tool micro-USM process during fabrication of microchannels

Kumar

Dvivedi

2019

J Braz. Soc. Mech. Sci. Eng.

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The tool wear affects the efficiency of micro-USM process and the quality of machined micro-features. In this research endeavor, wear mechanism of soft/ductile and hard/brittle tool materials is investigated comprehensively. Stainless steel-304 (SS-304) and tungsten carbide (WC) were selected as tool materials for rotary tool micro-USM (RT-MUSM) process. The effect of tool material properties on tool wear and performance of RT-MUSM process is also discussed. The effect of RT-MUSM process parameters, viz. rotation speed, feed rate, power rating and slurry concentration on material removal rate (MRR), depth of channel (DOC) and width over cut (WOC) are reported. The experimental results showed that SS-304 tool worn out rapidly due to plastic deformation followed by strain hardening. The superior properties of WC such as high wear resistance, compressive strength and good acoustic property led to reduction in tool wear and thereby significantly improved the performance of RT-MUSM. Additionally, multi-response optimization was applied to obtain maximum MRR, DOC and minimum WOC simultaneously.

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Fabrication of precise microchannels using a side-insulated tool in a spark assisted chemical engraving process

Cited by 28 publications

References 17 publications

Reducing Tool-Tip Wear in Micro ECDM Scanning Process with Feedback Control of Flexible Contact Force

Reducing Tool-Tip Wear in Micro ECDM Scanning Process with Feedback Control of Flexible Contact Force

WEDM of Copper for the Fabrication of Large Surface-Area Micro-Channels: A Prerequisite for the High Heat-Transfer Rate

Effect of tool materials on performance of rotary tool micro-USM process during fabrication of microchannels

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