2013
DOI: 10.3952/physics.v53i4.2765
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Fabrication of periodic micro-structures by holographic lithography

Abstract: The principles of the holographic lithography technique are reviewed, and the ability in the formation of structures with different periods by the holographic lithography technique in SZ2080 is demonstrated. The influence of laser exposure, phase shift between interfering laser beams, and the used laser wavelength on the structures fabricated by the four-beam interference technique has been studied. It is shown that by using the interfering beams with a different phase is it possible to reduce the period of th… Show more

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Cited by 29 publications
(11 citation statements)
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“…The contact points between old and freshly extruded logs create cooling points with surface tension pulling a liquid polymer by surface tension gradient towards colder regions. This is an effect similar to the so-called "repolymerization" [24] observed in DLW lithography, where overexposed regions seem to self-form repetitive structures in 1D and 2D manners. Despite that, such log pile micro-sieve structures having undercuts were successfully manufactured without any sacrificial substructures or support materials.…”
Section: D Printing Of Scaffoldssupporting
confidence: 62%
“…The contact points between old and freshly extruded logs create cooling points with surface tension pulling a liquid polymer by surface tension gradient towards colder regions. This is an effect similar to the so-called "repolymerization" [24] observed in DLW lithography, where overexposed regions seem to self-form repetitive structures in 1D and 2D manners. Despite that, such log pile micro-sieve structures having undercuts were successfully manufactured without any sacrificial substructures or support materials.…”
Section: D Printing Of Scaffoldssupporting
confidence: 62%
“…Holographic lithography (HL) is based on the multibeam interference phenomenon without using complex photomasks or optical systems . It is a simple and low‐cost technique to fabricate 1D, 2D, and 3D periodic geometries via a single laser exposure.…”
Section: Major Printing Methods For 3d‐printed Batteriesmentioning
confidence: 99%
“…In this way, any virtual images digitally generated from 3D computer-aided drawing (CAD) can be dynamically transferred into the materials exposed by virtue of optical projection and motion systems. Based on light-beam writing in this LS scheme, there have been several similar approaches developed as named after two-photon polymerization 2,18,34-37,39 (2PP), single-photon polymerization 9 (1PP), rapid prototyping, 15,37 holographic lithography, 38 and direct laser writing. 39 In common, using different suitable materials, they can accomplish versatile micro-to macromachining of complicated 3D geometries to submicrometer precision.…”
Section: Light Stereolithography (Ls)mentioning
confidence: 99%