Abstract:This paper presents a probe-based force-controlled nanoindentation method to fabricate ordered micro/nanostructures. Both the experimental and finite element simulation approaches are employed to investigate the influence of the interval between the adjacent indentations and the rotation angle of the probe on the formed micro/nanostructures. The non-contacting part between indenter and the sample material and the height of the material pile-up are two competing factors to determine the depth relationship betwe… Show more
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