Fabrication of nickel stamp with improved sidewall roughness for optical devices

Oh, Seung Hun; Cho, Sang Uk; Kim, Chang Seok; Han, Young-Hee; Cho, Cheon-Soo; Jeong, Myung Yung

doi:10.1016/j.mee.2011.03.021

Cited by 15 publications

(2 citation statements)

References 11 publications

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“…If the electrodeposition of metal ions goes on until a back with sufficient mechanical strength is formed, the electroforming process will come into the back-plating stage. And this stage is widely used in the fabrication of replication mold in the LIGA technology [18].…”

Section: Working Principlementioning

confidence: 99%

Fabrication of microlens based on overplating in electroforming

Sun

Wang

Xiong

et al. 2016

J. Micromech. Microeng.

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This paper presents an effective and flexible process to fabricate microlenses based on the overplating phenomenon in electroforming of microvias. With the overplating structures working as the master mold, the polymeric microlenses are replicated through a combination of PDMS molding and UV curing. Shape evolution of the overplating structures in electroforming leads to the formation of spherical surfaces and enables the fabrication of hemispherical lenses with various sizes and curvatures. Furthermore, through design of the pitch in the microvia array and control of the deposition time in electroforming, microlens arrays with packing ratios up to 100% can be obtained. Results of geometrical and optical measurements demonstrate the potential of this method in the fabrication of microlenses.

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Section: Working Principlementioning

confidence: 99%

Fabrication of microlens based on overplating in electroforming

Sun

Wang

Xiong

et al. 2016

J. Micromech. Microeng.

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“…The soft mold we use for imprinting is replicated from a SU-8 master mold by the cast-molding method. Compared with the master mold made by dry etching [38], [39], in silicon or silica, for example, the SU-8 mold can be obtained from a standard lithography process, which is more easy, reliable and repeatable. Moreover, the master mold made in this material leaves more room for improving the surface smoothness of the defined patterns.…”

Section: B Waveguide Fabrication With Uv-soft Selective Imprint Techmentioning

confidence: 99%

UV-soft Imprinted Tunable Polymer Waveguide Ring Resonator for Microwave Photonic Filtering

Han

Wang

et al. 2014

J. Lightwave Technol.

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A tunable polymer waveguide ring resonator is proposed and demonstrated for microwave photonic filtering. The ring resonator consists of a Mach-Zehnder interferometer (MZI) as the tunable coupler and two micro-heaters as the thermo-optic phase shifters. It was fabricated with inorganic-organic hybrid optical material polysiloxane-liquid series by a novel and simple UV-soft selective imprint technique. The coupling conditions, over-, critical-and under-coupling, were obtained with the microheater on the arm of MZI and the maximum notch depth of about 18 dB was achieved. The resonant wavelength was also tuned with the micro-heater on the ring waveguide. The dispersion induced power fading of radio over fiber link was overcome by the tunable ring resonator with its notch filtering function.Index Terms-Microwave photonics, notch filter, polymer waveguide, ring resonator, tunable coupler, UV-soft imprint.

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Magnetic field-assisted finishing: mechanism, application, and outlook

Yan,

Yang,

et al. 2023

Int J Adv Manuf Technol

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Fabrication of nickel stamp with improved sidewall roughness for optical devices

Cited by 15 publications

References 11 publications

Fabrication of microlens based on overplating in electroforming

Fabrication of microlens based on overplating in electroforming

UV-soft Imprinted Tunable Polymer Waveguide Ring Resonator for Microwave Photonic Filtering

Magnetic field-assisted finishing: mechanism, application, and outlook

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