Abstract:We have fabricated NbTiN tunnel junctions by introducing a Hf overlayer to a junction barrier layer. Two types of junctions consisting of NbTiN/Hf/Al-AlN x /NbTiN and NbTiN/Hf-HfO x /NbTiN were fabricated on thermally oxidized Si substrates. The electrical characteristics for junctions with various thickness of the Hf layer were evaluated at 4.2 K and compared. The results indicated that the diffusion of nitrogen from the base NbTiN layer into the normal layer was suppressed. In addition, the normal coherence … Show more
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.