2003
DOI: 10.1021/nl034835u
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Fabrication of Nanoring Arrays by Sputter Redeposition Using Porous Alumina Templates

Abstract: Ordered arrays of Au, Ni, and Si nanorings have been fabricated using Ar + sputter redeposition of material in a porous alumina mask. Typical ring dimensions are 50 nm inner diameter and 10−15 nm wall thickness with heights ranging from 50 to 200 nm. Ring composition was confirmed by electron microscopy. Ring diameter, height, and spacing are controllable by varying the process conditions. This process is scalable and parallel, so that highly ordered nanorings over millimeter-sized regions are possible.

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Cited by 166 publications
(120 citation statements)
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“…[6][7][8][9][10] AAO membrane is prepared from aluminum metal by electrochemical anodization in an electrolytic cell. While the technology of AAO and its application has a long history, 11 basic research on self-organization of nanostructures via AAO templates began much more recently, with self-organizing and prepattern guided anodization techniques.…”
Section: -5)mentioning
confidence: 99%
“…[6][7][8][9][10] AAO membrane is prepared from aluminum metal by electrochemical anodization in an electrolytic cell. While the technology of AAO and its application has a long history, 11 basic research on self-organization of nanostructures via AAO templates began much more recently, with self-organizing and prepattern guided anodization techniques.…”
Section: -5)mentioning
confidence: 99%
“…Nanorings have been produced by a variety of methods, such as the coating of nanoparticles (Larsson et al, 2007;He at al 2010), the use of templates (Hobbs et al, 2004), the agglomeration of nanoclusters (Mishra et al, 2007), deposition on block co-polymers (Zahr and Blum, 2012;Wang et al, 2011), partial capping of quantum dots (Stoffel et al, 2009) and droplet epitaxy (Somaschini et al, 2009;Li and Yang, 2008). Most of these techniques are strain-free, except for the partial capping process, which typically involves significant intermixing producing a non-uniformly alloyed quantum ring (Hanke et al, 2007).…”
Section: Introductionmentioning
confidence: 99%
“…There are several methods for preparation of such rings. For example, gold rings can be designed by using templates of suitable structure in combination with metal deposition via ion beam etching [17,18]. More recently, Yan et al have prepared gold rings by selective wetting of porous templates using polymer membranes [19].…”
Section: Introductionmentioning
confidence: 99%