Fabrication of Multilayer Pb(Zr0.53Ti0.47)O3 Film Crystallized by Laser Annealing

Chen, Xianfeng; Yagi, Masahiro; Akiyama, Yoshikatsu; Machida, Osamu; Ohta, Eiji; Meixner, Melanie; Stollenwerk, Jochen; Boettger, Ulrich; Schneller, Theodor

doi:10.7567/jjap.52.09ka06

Cited by 4 publications

References 30 publications

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Chemical Solution Deposition (CSD)

Bäcker¹,

Baumann²,

Brunkahl³

et al. 2019

Digital Encyclopedia of Applied Physics

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Chemical solution deposition (CSD) can offer economic access to large area coatings, which are required to handle significant amounts of energy in innovative applications. CSD represents an umbrella term encompassing various methods such as sol–gel, metallo‐organic decomposition (MOD), and chemical bath deposition (CBD), which are used for the fabrication of functional metal chalcogenide films. These methods are all based on the layer fabrication from precursors dissolved in the liquid phase, which are transformed into the final functional film material by different working principles. The differences are related to the involved chemistry, solvent, temperatures, and heating processes, as described herein. In addition, chemical and physical deposition methods are briefly compared, highlighting their advantages and disadvantages.

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Chemical Solution Deposition (CSD)

Bäcker¹,

Baumann²,

Brunkahl³

et al. 2019

Digital Encyclopedia of Applied Physics

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Laser pyrolysis in papers and patents

2021

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This paper presents a critical review of laser pyrolysis. Although this technology is almost 60 years old, in literature many researchers, both from academia and industry, are still developing and improving it. On the contrary industrial applications are struggling to take off, if not in very restricted areas, although the technology has undoubted advantages that justify future development. The aim of this work consists in analysing a representative pool of scientific papers (230) and patents (121), from the last 20 years, to have an overview about the evolution of the method and try to understand the efforts spent to improve this technology effectively in academia and in industry. This study is important to provide a complete review about the argument, still missing in the literature. The objective is to provide an overview sufficiently broad and representative in the sources and to capture all the main ways in which laser pyrolysis has been used and with what distribution. The main focuses of the study are the analyses of the functions carried out by laser technologies, the application fields, and the types of used laser (i.e. models, power and fluence). Among the main results, the study showed that the main use of laser pyrolysis is to produce nanoparticles and coatings, the main materials worked by laser pyrolysis are silicon and carbon dioxide and the main searched properties in the products of laser pyrolysis are catalysts activity and electrical conductivity. CO2 lasers are the most used and the have high versatility compared to others. In conclusion, the study showed that laser pyrolysis is a consolidated technology within its main application fields (nanoparticles and coatings) for several years. Within this context, the technology has been developed on very different sizes and processes, obtaining a very wide range of results. Finally, these results may also have stimulated new areas of experimentation that emerged mainly in recent years and which concern biomedical applications, additive manufacturing, and waste disposal. Graphical abstract

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Impact of the processing temperature on the laser-based crystallization of chemical solution deposited lead zirconate titanate thin films on short timescales

Fink

Lübben

Schneller

et al. 2022

Journal of Applied Physics

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In this work, the laser-based annealing process of sol-gel-derived piezoelectric PZT53/47 (lead zirconate titanate) thin films deposited on platinized silicon substrates is investigated. A temperature control closed loop is implemented to allow for the measurement and control of the annealing temperature. Samples are treated at temperatures of up to 900 °C and heating rates between 300 and 9000 K/s in ambient conditions. The results show that highly functional PZT thin films can be crystallized at interaction times of less than 1 s while exhibiting a remanent polarization of up to 28 μC/cm2 and a piezoelectric coefficient of up to 49 pm/V. X-ray diffraction analysis shows that an intermetallic Pt3Pb phase forms prior to the formation of phase pure PZT. With decreasing interaction time between the laser beam and the thin film, the temperature range in which this Pt3Pb phase is stable extends toward temperatures as high as 900 °C without the formation of phase pure PZT. Furthermore, a decrease in the interaction time requires higher annealing temperatures to form fully crystalline PZT thin films. Scanning electron microscope images reveal that short interaction times shift the nucleation of the PZT thin films from epitaxial to heterogeneous nucleation. Overall, it is demonstrated that the crystallization time of chemical solution deposited PZT thin films can be reduced significantly by using laser radiation.

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Fabrication of Multilayer Pb(Zr_0.53Ti_0.47)O₃ Film Crystallized by Laser Annealing

Cited by 4 publications

References 30 publications

Chemical Solution Deposition (CSD)

Chemical Solution Deposition (CSD)

Laser pyrolysis in papers and patents

Impact of the processing temperature on the laser-based crystallization of chemical solution deposited lead zirconate titanate thin films on short timescales

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