2000
DOI: 10.1117/12.387568
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Fabrication of microgrooves with excimer laser ablation techniques for plastic optical fiber array alignment purposes

Abstract: Laser ablation is extremely well suited for rapid prototyping and proves to be a versatile technique delivering high accuracy dimensioning and repeatability of features in a wide diversity of materials. In this paper, we present laser ablation as a fabrication method for micro machining of arrays consisting of precisely dimensioned U-grooves in dedicated polycarbonate and polymethylmetacrylate plates. The dependency of the performance on various parameters (wavelength, energy density and pulse frequency) is di… Show more

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Cited by 3 publications
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“…For example, Carson et al (2007) and Guan et al (2010) employed miniature devices utilizing a large collection of grilles for DNA (deoxyribonucleic acid) and cell detection; Naessens et al (2000) implemented precision alignment for plastic optical fibres using microgroove structures; and Chang (2005) and Fischbach and Dunning (2008) successfully applied microgrooves as micro fluid channels in biomedical and biochemical devices. Research into technologies for machining precise microgroove arrays has been undertaken in many areas, such as the MEMS (micro electro mechanical system) process, etching, short pulse laser methods, micro milling, micro EDM, and ultra-precision machining.…”
Section: Introductionmentioning
confidence: 98%
“…For example, Carson et al (2007) and Guan et al (2010) employed miniature devices utilizing a large collection of grilles for DNA (deoxyribonucleic acid) and cell detection; Naessens et al (2000) implemented precision alignment for plastic optical fibres using microgroove structures; and Chang (2005) and Fischbach and Dunning (2008) successfully applied microgrooves as micro fluid channels in biomedical and biochemical devices. Research into technologies for machining precise microgroove arrays has been undertaken in many areas, such as the MEMS (micro electro mechanical system) process, etching, short pulse laser methods, micro milling, micro EDM, and ultra-precision machining.…”
Section: Introductionmentioning
confidence: 98%
“…An optical glass microgroove array is an important component in photoelectric systems due to its function of reducing light reflectivity, improving transmittance/diffraction efficiency, and controlling light spectrum distribution [1][2][3]. However, it is difficult to fabricate optical glass microgrooves directly because of the brittleness of the glass materials at room temperature [4][5][6].…”
Section: Introductionmentioning
confidence: 99%
“…Microgrooves are highly required in a variety of fields such as DNA detection [1,2], plastic optical fibre alignment [3], micro fluid channels in biomedical and biochemical applications and various optical devices. Consequently, various micro machining techniques, such as the MEMS process, laser beam, micro milling, micro EDM and ultra precision machining have been developed for machining microgrooves.…”
Section: Introductionmentioning
confidence: 99%