Fabrication of microfluidic structures in quartz via micro machining technologies

Lin, Ying-Chieh; Lee, Chung-Ching; Lin, Heng-Sheng; Hong, Zheng-Han; Hsu, Fu-Chuan; Hung, Tsung-Pin; Lyu, Yuting

doi:10.1007/s00542-015-2717-y

Cited by 8 publications

(3 citation statements)

References 28 publications

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“…Rounded cracks were formed and the machined surface melted when using the electrochemical spark trepanning process [ 18 ]. A high aspect ratio was obtained using the ultra-short laser-machining processes; however, the surface roughness and surface quality were poor [ 19 ]. Furthermore, these processes had a high setup and machining cost.…”

Section: Introductionmentioning

confidence: 99%

Improvement of the Machining Performance of the TW-ECDM Process Using Magnetohydrodynamics (MHD) on Quartz Material

et al. 2021

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Many microslits are typically manufactured on quartz substrates and are used to improve their industrial performance. The fabrication of microslits on quartz is difficult and expensive to achieve using recent traditional machining processes due to its hardness, electrically insulating nature, and brittleness. The key objective of the current study was to demonstrate the fabrication of microslits on quartz material through a magnetohydrodynamics (MHD)-assisted traveling wire-electrochemical discharge micromachining process. Hydrogen gas bubbles were concentrated around the entire wire surface during electrolysis. This led to a less active dynamic region of the wire electrode, which decreased the adequacy of the electrolysis process and the machining effectiveness. The test results affirmed that the MHD convection approach evacuated the gas bubbles more rapidly and improved the void fraction in the gas bubble scattering layer. Furthermore, the improvements in the material removal rate and length of the cut were 85.28% and 48.86%, respectively, and the surface roughness was reduced by 30.39% using the MHD approach. A crossover methodology with a Taguchi design and ANOVA was utilized to study the machining performance. This exploratory investigation gives an unused strategy that shows a few advantages over the traditional TW-ECDM process.

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Section: Introductionmentioning

confidence: 99%

Improvement of the Machining Performance of the TW-ECDM Process Using Magnetohydrodynamics (MHD) on Quartz Material

et al. 2021

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“…Currently techniques for large-scale replication and production of planar and 3D microuidic devices include micromachining, 10 embossing, 11,12 in situ construction injection molding, 13 laser ablation, 14,15 and so lithography. 16,17 Some of those techniques require expensive equipment and are labor intensive.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of PDMS microfluidic devices with 3D wax jetting

Yang

et al. 2017

RSC Adv.

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“…However, the laser method often suffered from microcracks and other collateral damage. Lin et al [ 5 ] used an ultra-precision machining method to fabricate cross-junction channels (14 µm wide and 28 µm deep) with a three dimensional (3D) triangle cross-section. However, the minimum size of the mechanical workability depends on the tool shape, and it is hard to achieve a tool diameter smaller than 50 μm.…”

Section: Introductionmentioning

confidence: 99%

Study the Formation Process of Cuboid Microprotrusion by Glass Molding Process †

et al. 2017

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This paper investigates the formation process of a typical microstructure in the glass microfluidic chip, i.e., cuboid microprotrusion, by the soda-lime glass molding process (GMP). The finite element models on the platform Abaqus/Standard were established for simulating the glass molding process. The glass viscoelasticity at pressing temperature was described by the General Maxwell model. The influence of the temperature, aspect ratio and side wall angle on the replication ratio was investigated, and the corresponding predicted molded profiles were demonstrated as well. The established simulation model was verified by experimental results eventually. It could provide a fundamental experience for optimizing glass molding parameters to fabricate microstructures on glass chips.

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Fabrication of microfluidic structures in quartz via micro machining technologies

Cited by 8 publications

References 28 publications

Improvement of the Machining Performance of the TW-ECDM Process Using Magnetohydrodynamics (MHD) on Quartz Material

Improvement of the Machining Performance of the TW-ECDM Process Using Magnetohydrodynamics (MHD) on Quartz Material

Fabrication of PDMS microfluidic devices with 3D wax jetting

Study the Formation Process of Cuboid Microprotrusion by Glass Molding Process †

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