Fabrication of microelectrodes for EDM machining by a combined etching process

Weng, Feng-Tsai

doi:10.1088/0960-1317/14/5/n01

Cited by 12 publications

(6 citation statements)

References 12 publications

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“…The LECD process can be an effective solution for fabricating different complex-shaped electrodes for micro-EDM. Besides the LECD process other fabrication processes are, for example, the reverse EDM process [19], using sacrificial electrode [20], multi-EDM grinding process [21], rapid prototyping [22,23], selective laser sintering [24], a combined sequence process of WEDG, ultrasonic-aided chemical etching and an electrochemical anodic etching procedure [25], etching [26], and conventional material removal processes [27,28]. The above-mentioned processes have some drawbacks and limitations with respect to LECD.…”

Section: Introductionmentioning

confidence: 99%

Modelling for fabrication of microelectrodes by localized electrochemical deposition for micro-electrodischarge machining

Habib

Shaleh

Rahman

2010

Proceedings of the Institution of Mechanical Engineers, Part B:

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This paper presents the theoretical modelling and experimental investigation on the effect of different localized electrochemical deposition (LECD) parameters for fabricating a variety of microstructures. In order to estimate the rate of the deposition and the condition of the deposited structure, a set of mathematical relations is developed with the help of Faraday's laws of electrolysis and the Butler–Volmer equation. Mathematical simulation results are validated by experimental results. In this experimental process copper was deposited on the cathode surface. The variation in structure of the deposited electrode is achieved by changing the shape of a non-conductive mask. This mask is fabricated by an on-machine micromilling process and it is kept in contact with the cathode surface. The whole system is immersed in an acidified copper sulphate plating solution. This study gives a clear indication of the optimized operating range for the LECD process in order to fabricate high aspect ratio microstructures. Futhermore, the performance of the LECD electrode is evaluated by the fabrication of microholes on high-melting-point material such as a stainless steel workpiece.

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Section: Introductionmentioning

confidence: 99%

Modelling for fabrication of microelectrodes by localized electrochemical deposition for micro-electrodischarge machining

Habib

Shaleh

Rahman

2010

Proceedings of the Institution of Mechanical Engineers, Part B:

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“…Copper could be etched by a FeCl 3 or CuCl 2 enchant [4][5][6], and the TiNi foil could also be etched to a thickness of about 10 µm by using a proper volume ratio of HF/HNO 3 /H 2 O etching solution [7]. Although chemical machining (CHM) can be used to machine a Cu metal rod to a small size, the work piece has very high surface roughness [8]. Electrochemical machining (ECM) has many advantages in productivity, efficiency, flexibility and cost effectiveness, and it is well known for the unconventional machining process.…”

Section: Introductionmentioning

confidence: 99%

Manufacturing of a micro-tungsten carbide electrode using a supersonic-aided electrolysis process

Weng¹,

Ho²

2008

J. Micromech. Microeng.

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In this study, a novel micromachining technology for fabricating micro parts was described. The original diameter of a tungsten carbide rod was 3 mm, and it was first processed to a rod with a diameter of 50 µm by a precision-grinding process. It could then be machined to the desired diameter by a supersonic-aided electrolysis process. A high-aspect ratio of the micro-tungsten carbide rod was easily obtained by this process. The surface roughness of the sample that was processed by electrolysis with supersonic-aided agitation was compared with that of the sample obtained without agitation. The machined surface of the sample was smooth, and the reason may be that ionized particles in the anode could be removed by supersonic-aided agitation during the electrolysis process. A microelectrode with a tip of approximately 1 µm could be obtained by this process.

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“…Copper can be etched by FeCl 3 or CuCl 2 enchant [4][5][6], and the thickness of the TiNi foil could be etched to about 10µm by a proper volume ratio of HF/HNO 3 /H 2 O etching solution [7]. Although chemical machining (CHM) can be used to machine a metal rod to a small size, but the surface of the work piece is uneven [8]. Electrochemical machining (ECM) is a well known for the non-traditional machining process.…”

Section: Introductionmentioning

confidence: 99%

Manufacturing of a micro probe using supersonic aided electrolysis process

Shyu

Weng

2008

2008 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS

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Abstract-In this paper, a practical micromachining technology was applied for the fabrication of a micro probe using a complex nontraditional machining process. A series process was combined to machine tungsten carbide rods from original dimension. The original dimension of tungsten carbide rods was 3mm; the rods were ground to a fixed-dimension of 50µm using precision grinding machine in first step. And then, the rod could be machined to a middle-dimension of 20µm by electrolysis. A final desired micro dimension can be achieved using supersonic aided electrolysis. High-aspect-ratio of micro tungsten carbide rod was easily obtained by this process. Surface roughness of the sample with supersonic aided agitation was compared with that with no agitation in electrolysis. The machined surface of the sample is very smooth due to ionized particles of anode could be removed by supersonic aided agitation during electrolysis. Deep micro holes can also be achieved by the machined high-aspect-ratio tungsten carbide rod using EDM process. A micro probe of a ball shape at the end was processed by proposed supersonic aided electrolysis machining process.

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Fabrication of microelectrodes for EDM machining by a combined etching process

Cited by 12 publications

References 12 publications

Modelling for fabrication of microelectrodes by localized electrochemical deposition for micro-electrodischarge machining

Modelling for fabrication of microelectrodes by localized electrochemical deposition for micro-electrodischarge machining

Manufacturing of a micro-tungsten carbide electrode using a supersonic-aided electrolysis process

Manufacturing of a micro probe using supersonic aided electrolysis process

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