Fabrication of Micro XY-Stage with Large-Area Rectangular Shuttle using Anodic Bonding Process

Kim, Che-Heung; Kim, Yong-Kweon; Jeong, Hee-Moon; Choi, Ji Il; Jeon, Jong-Up

doi:10.1007/978-3-642-59497-7_179

Search citation statements

Order By: Relevance

Paper Sections

Select...

A Microchannel Assisted Release Process ( Carp)1

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2003

Publication Types

Select...

Article1

Relationship

Self Cite0

Independent1

Authors

Journals

Cited by 1 publication

(1 citation statement)

References 3 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…A novel release process, CARP was developed to fabricate a free-standing large square plate without any etch holes and to resist downward sticking [16]. Fig.…”

Section: A Microchannel Assisted Release Process ( Carp)mentioning

confidence: 99%

Silicon micro XY-stage with a large area shuttle and no-etching holes for SPM-based data storage

Kim

Jeong

Jeon

et al. 2003

J. Microelectromech. Syst.

View full text Add to dashboard Cite

A micro XY-stage with a 5 5 mm 2 -area shuttle is fabricated for application in a nanometer-scale data storage device. A central shuttle of the device is designed as a large square on which a high-density recording medium is deposited. Perpendicularly combined comb-drive actuators allow the large shuttle free access in the x-y plane. No etching holes on the central shuttle are preferred in order to maximize the effective recording area. Therefore, a novel release process, Micro-Channel Assisted Release Process ( CARP) is proposed to release a large plate structure without any etching holes and to resist downward sticking. The static and dynamic strokes of the device were measured. Mechanical interferences between x-and y-directional drives were estimated by finite-element method (FEM) analysis and compared with the experimental results.[876]Index Terms-High-density storage, large area shuttle, micro XY-stage, scanning probe microscopy (SPM), micro-channel assisted release process ( CARP).

show abstract

“…A novel release process, CARP was developed to fabricate a free-standing large square plate without any etch holes and to resist downward sticking [16]. Fig.…”

Section: A Microchannel Assisted Release Process ( Carp)mentioning

confidence: 99%