Fabrication of micro-structure on glass surface using micro-indentation and wet etching process

Saito, Yasuhiro; Okamoto, Shinya; Miki, A.; Inomata, Hachiro; Hidaka, Takehiko; Kasai, Hiroaki

doi:10.1016/j.apsusc.2008.05.320

Cited by 12 publications

(15 citation statements)

References 8 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…So, the higher the positive changes of surface roughness, the better the material surface it is. As reported previously [12,14,16], poor surface roughness was obtained with a prolonged etching duration (over etching) and high temperatures. In this work, etching temperature was found to significantly influence the surface roughness of MGC and BN.…”

Section: Surface Roughnesssupporting

confidence: 73%

“…As shown in Figure 6, reduction of surface roughness for MGC, BN and SiC was increased with etching temperature. Reduction of surface roughness takes place mainly due to the chemical reaction at the desired surface area [69,70]. This phenomenon is similar to etching rate all materials where it increases with rising etching temperature.…”

Section: Surface Roughnessmentioning

confidence: 58%

“…Platelets show sharp boundaries instead of rounded ones observed in the thermally etched samples. Choi et al [68] and Cakir et al [70] noticed the trend of surface roughness changed with etching temperature. Poor surface roughness is obtained at higher etching temperatures [65,67].…”

Section: Surface Roughnessmentioning

confidence: 99%

“…In overcoming these difficulties, a new technology has been introduced to replace mask patterning by micro-indentation. This technique enhanced versatility and provided lower cost for initial facilities and manufacture, simplicity of process and material selectivity [12,13,[69][70][71]. Typically, 5N load (P = 500 Nm -2 ) is applied on the material surface where patterning is required and then followed by etching process.…”

Section: Effect Of Indentationmentioning

confidence: 99%

“…One of the key issues of this technology is its ability to increase and control the etching rate difference between indented and non-indented areas. Saito et al [13,14] were the first to develop this technique and prove its feasibility for micro-machining and fabrication of alumina-silicate glass. Nagai et al [15] and Kang and Youn [12] who fabricated micro-patterns on advanced ceramics, found in this technique a substitute for the application of masks.…”

Section: Introductionmentioning

confidence: 99%

See 4 more Smart Citations

Predictive Modelling of Etching Process of Machinable Glass Ceramics, Boron Nitride, and Silicon Carbide

Ting

Abou-El-Hossein

Chua

2011

MSA

View full text Add to dashboard Cite

The present paper discusses the development of the first and second order model for predicting the chemical etching variables, namely, etching rate, surface roughness and accuracy of advanced ceramics. The first and second order etching rate, surface roughness and accuracy equations were developed using the Response Surface Method (RSM). The etching variables included etching temperature, etching duration, solution and solution concentration. The predictive models’ analyses were supported with the aid of the statistical software package – Design Expert (DE 7). The effects of the individual etching variables and interaction between these variables were also investigated. The study showed that predictive models successfully predicted the etching rate, surface roughness and accuracy readings recorded experimentally with 95% confident interval. The results obtained from the predictive models were also compared with Multilayer Perceptron Artificial Neural Network (ANN). Chemical Etching variables predictive by ANN were in good agreement with those with those obtained by RSM. This observation indicated the potential of ANN in predicting chemical etching variables thus eliminating the need for exhaustive chemical etching in optimization

show abstract

Section: Surface Roughnesssupporting

confidence: 73%

Section: Surface Roughnessmentioning

confidence: 58%

Section: Surface Roughnessmentioning

confidence: 99%

Section: Effect Of Indentationmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 3 more Smart Citations

Predictive Modelling of Etching Process of Machinable Glass Ceramics, Boron Nitride, and Silicon Carbide

Ting

Abou-El-Hossein

Chua

2011

MSA

View full text Add to dashboard Cite

show abstract

Research on the mapping grinding of dimple surface with ordered pattern based on topological theory

Lyu

Li²,

Yongchao³

2022

Int J Adv Manuf Technol

View full text Add to dashboard Cite

In order to grind structured dimple surface, a topological mapping grinding method for structured dimple surface was proposed based on grinding kinematics principle and point set topology. Firstly, the topological space of the workpiece and the grinding wheel was established, and the topological features of the structured dimple surface and the structured grinding wheel were extracted based on the analysis of the morphology features of the structured surface with array, staggered and phyllotactic pattern. Then, the topology mapping equation of the grinding process was constructed based on the analysis of the generating mechanism of the dimple surface about grinding geometry, and the structured grinding wheel was designed according to the topology mapping equation. Finally, according to the grinding geometry simulation, the influence of grinding parameters on the generating of dimple surface morphology was studied, and the grinding experiment was carried out. The results show that the structured grinding wheel designed according to the topological features of the structured dimple surface can achieve the grinding of the structured dimple surface. The ground dimple surface is a topological dimple surface, and the feature parameters of the dimple surface can be changed with the change of grinding parameters, but the topological feature properties remain unchanged under the condition of satisfying the proper grinding speed ratio.

show abstract

Evolution of HF etching rate of borosilicate glass by friction-induced damages

Qiao

2020

Applied Surface Science

View full text Add to dashboard Cite

Fabrication of micro-structure on glass surface using micro-indentation and wet etching process

Cited by 12 publications

References 8 publications

Predictive Modelling of Etching Process of Machinable Glass Ceramics, Boron Nitride, and Silicon Carbide

Predictive Modelling of Etching Process of Machinable Glass Ceramics, Boron Nitride, and Silicon Carbide

Research on the mapping grinding of dimple surface with ordered pattern based on topological theory

Evolution of HF etching rate of borosilicate glass by friction-induced damages

Contact Info

Product

Resources

About