Fabrication of micro/nano-fluidic channels by single-beam direct femtosecond laser writing

Dewanda, Fadia; Ahsan, Md. Shamim; Lee, Man Seop

doi:10.1117/12.2003347

Cited by 4 publications

(3 citation statements)

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“…At present, the fabrication methods for nano-channels mainly include high-resolution machining technology [ 13 , 14 , 15 ], sacrificing layer technology [ 16 , 17 ], the crack method [ 18 , 19 ], PDMS deformation [ 20 , 21 ], molecular self-assembly [ 22 , 23 , 24 ], and nano-imprinting technology [ 25 , 26 , 27 ]. The high-resolution machining technology mentioned above uses nanoscale resolution to expose or directly write nano-channels on the substrate, which provides the advantages of flexibility, controllability, high accuracy, and good quality.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of High Aspect Ratio Nano-Channels by Thermal Nano-Imprinting and Parylene Deposition

2023

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A low-cost method of fabrication of high aspect ratio nano-channels by thermal nano-imprinting and Parylene deposition is proposed. SU-8 photoresist nano-channels were first manufactured by thermal nano-imprinting, and Parylene deposition was carried out to reduce the width of the nano-channels and increase the aspect ratio. During the process, the side walls of the SU-8 nano-channels were covered with the Parylene film, reducing the width of the nano-channels, and the depth of the channels increased due to the thickness of the Parylene film deposited on the surface of the SU-8 nano-channels, more so than that at the bottom. The influence of Parylene mass on the size of nano-channels was studied by theoretical analysis and experiments, and the deposition pressure of Parylene was optimized. The final high aspect ratio nano-channels are 46 nm in width and 746 nm in depth, of which the aspect ratio is 16. This simple and efficient method paves the way for the production of high aspect ratio nano-channels.

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Section: Introductionmentioning

confidence: 99%

Fabrication of High Aspect Ratio Nano-Channels by Thermal Nano-Imprinting and Parylene Deposition

2023

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“…Thus gas laser is mainly used for glass, paper, and polymer ablation, while crystal and fiber laser are mainly used for metal ablation. It is know that the spot size of the laser is inversely proportional to the wavelength of the laser [24]. A smaller ablated channel is associated with shorter laser wavelength.…”

Section: Introductionmentioning

confidence: 99%

Low Cost and Simple PMMA Nozzle Fabrication by Laser Cutting and PDMS Curing Bonding

Cheng

Yang

Yin

et al. 2020

Int. J. Precis. Eng. Manuf.

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Electrohydrodynamic (EHD) printing can rapidly fabricate micro-or nano-scale lines without employment of any mask, which is suitable for small volume production in industrial applications. However, it is required that the nozzles should be disposable since they can easily be blocked by the un-cleaned ink. CO 2 laser is an excellent tool for fabrication of microtrenches in most of polymers with low-cost and high-speed. This paper presented a low-cost PMMA (Polymethyl methacrylate) nozzle fabrication method based on laser cutting and PDMS (Polydimethylsiloxane) curing bonding. The influence of thickness on the maximum stress and deformation rate of PMMA substrate was investigated to decrease the deformation of PMMA nozzle after laser cutting. To avoid stress concentration in PMMA nozzle after thermal bonding, PDMS curing bonding method was proposed. The effect of spin-coating speed on PDMS thickness was studied. The O 2 plasma conditions were optimized based on contact angle to improve the bonding strength of PMMA nozzle. The EHD printing experiments demonstrated the practicability of proposed nozzle fabrication method.

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“…To achieve nano-sized polymer needles, it is crucial to fabricate nano channels. However, the nano channels are generally engraved by electron beam [16,17], proton beam [18,19], focused ion beam [20,21], or direct laser writing [22,23], which is costly and time-consuming.…”

Section: Introductionmentioning

confidence: 99%

A new low-cost fabrication method of SU-8 micro–nano channels and needle tip in electro-hydrodynamic jet chips

Sun

Liu

et al. 2018

J. Micromech. Microeng.

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Electro-hydrodynamic (EHD) jets are widely used for direct writing of micro and nano structures. However, the application of an EHD jet is limited by its high-cost production process. To overcome the drawbacks mentioned above, a new fabrication method of polymer EHD jet needle is proposed in this paper. A silicon nano mold is firstly produced by inclined deposition technique, and a micro–nano PDMS mold is developed by casting double-layer PDMS on the silicon nano mold with a photomask film between the two PDMS layers. Using the micro–nano PDMS mold, a micro–nano needle can be fabricated in SU-8 photoresist layers by thermal nanoimprinting and ultraviolet lithography. In the manufacturing process, the exposure parameters and the thermal bonding parameters were optimized. The final chip consists of micro–nano channels, in which the nano channels are 380 nm in width and 72 nm in depth. The chip is tested with fluorescent dye, indicating that the micro–nano channels are fabricated without blockage or leakage. This low-cost fabrication method of micro–nano needle may have a great contribution to direct write-on-demand nano-patterning technology.

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Fabrication of micro/nano-fluidic channels by single-beam direct femtosecond laser writing

Cited by 4 publications

References 0 publications

Fabrication of High Aspect Ratio Nano-Channels by Thermal Nano-Imprinting and Parylene Deposition

Fabrication of High Aspect Ratio Nano-Channels by Thermal Nano-Imprinting and Parylene Deposition

Low Cost and Simple PMMA Nozzle Fabrication by Laser Cutting and PDMS Curing Bonding

A new low-cost fabrication method of SU-8 micro–nano channels and needle tip in electro-hydrodynamic jet chips

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